Chinese Journal of Lasers, Volume. 51, Issue 12, 1202403(2024)

Optical Fabrication Technology Based on Vector Optical Field (Invited)

Lijia Xu1,2,4, Qingsong Wang1,3, Xiaofang Fu1,3, Qi Zhang1,3,5, Qiong He1,3, Zeyu Zhao1,3、*, and Xiangang Luo1,3,4
Author Affiliations
  • 1State Key Lab of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, Sichuan , China
  • 2School of Automation Engineering, University of Electronic Science and Technology of China, Chengdu 611731, Sichuan , China
  • 3National Key Laboratory of Optical Filed Manipulation Science and Technology, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, Sichuan , China
  • 4College of Materials Sciences and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
  • 5Research Center on Vector Optical Fields, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, Sichuan , China
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    Figures & Tables(10)
    Framework of this review
    Nano channels fabricated by femtosecond Bessel beam[34]. (a) Processing diagram by femtosecond Bessel beam; (b) schematic of conical energy transmission to center; channels processed at energies of (c) 0.65 mJ and (d) 0.85 mJ
    [in Chinese]
    Scanning electron microscope (SEM) images and Raman imaging results of multi-ring structures processed by different polarization beams[45]. (a)‒(c) Linear polarization beam; (d)‒(f) azimuthal polarization beam
    Fabrication of chiral micro-nanostructures. (a)‒(f) Schematic of laser polarization-directed growth of chiral nanostructures[51];
    Preparation of high depth-to-width ratio structures. (a)‒(h) Preparation of high aspect-ratio nanopore with diameter of 10‒30 nm on sapphire substrate using optimized longitudinal field[58]; (i)‒(r) evolution of vertical nanopillar morphology on surface of laser-induced materials with laser flux of Bessel ring and its formation mechanism[61]
    Liquid crystal polarization gratings. (a) 1D grating morphology and molecular orientation under polarized light microscope[79]; (b) two-dimensional gratings with different crossing angles under polarized light microscope[81]; (c) light splitting of wideband achromatic high efficiency grating [77]
    Liquid crystal lenses. (a) Images of microlens with Fnumber of 2 charactered by polarized optical microscope[83]; (b) shortening focal length of large-size liquid crystal lenses by double-sided machining[86]; (c) orientation distribution diagrams, element representation images, and effects of elements on light for liquid crystal lens and liquid crystal axicon[87]
    Liquid crystal vortex phase elements. (a) Polarization light microscopy photographs of liquid crystal vortex plates with different topological charge numbers[88]; (b) theoretical and experimental representations of vortex plates (and arrays) with complex phase distributions[89]; (c) parallel optical spin and orbital angular momentum encoding based on digitized geometric phase [90]
    • Table 1. Key parameters of laser micro-nano machining based on VOF

      View table

      Table 1. Key parameters of laser micro-nano machining based on VOF

      YearMaterialVOF

      Laser

      parameter

      Processing

      type

      Processing

      parameter

      Thickness

      Feature

      size

      Depth to width ratio
      202338Glass

      Bessel

      beams

      λ=1030 nm,

      W=500 fs,

      f=1.28 GHz,

      J=200 μJ

      Laser

      cutting

      1 mm
      202343Steel

      Cylindrical

      VOFs

      λ=1030 nm,

      W=400 fs,

      f=100 kHz,

      J=51.3 μJ

      Laser

      ablation

      Volume ablated by

      each pulse is 106.6 μm3

      80% higher than that

      by Gauss beam

      202142Platinum

      Radially and

      azimuthally

      polarized beams

      λ=1030 nm,

      W=757 fs,

      f=10.6 MHz,

      J= 4.2 μJ

      Laser

      ablation

      Processed area for

      one minute is 378 cm2

      100 nm

      Ablated line

      width of 32 μm

      202139Glass

      Bessel‑Gauss

      beams

      λ=1028 nm,

      W=1 ps,

      f=50 kHz,

      J=105 μJ

      Laser

      ablation

      0.3 mm

      3D tubular structure

      diameter of 10 μm

      202351Gold

      Spiral

      polarization

      beams

      λ=446 nm,

      power of 4 mW

      Laser direct

      writing

      Chiral nanostructure

      diameter of 1.4 μm

      202359Silica

      3D Bessel

      beams

      λ=800 nm,

      W=120 fs,

      f=1 kHz,

      J=0.6 μJ

      Laser direct

      writing

      Laser scanning

      rate of 10 μm/s

      Twisted nanograting

      pitch of 1 μm

      202258Sapphire

      Longitudinal

      light fields

      λ=800 nm,

      W=100 fs,

      f=1 kHz,

      J=120 nJ

      Laser

      ablation

      Deep hole diameter

      of 10 nm

      16∶1
      2022444H-SiC

      Cylindrical

      VOFs

      λ=520 nm,

      W=300 fs,

      f=10 kHz,

      J=12 μJ

      Laser

      ablation

      Laser scanning

      rate of 500 μm/s

      Groove width

      of 20.8 μm

      0.322∶1
      202260Silica

      Bessel

      beams

      λ=1030 nm,

      W=300 fs,

      single shot,

      J=2.0 μJ

      Laser direct

      writing

      Nanochannel feature

      size of 18 nm

      >200∶1
      202461Sapphire

      Bessel

      beams

      λ=800 nm,

      W=115 fs,

      single shot,

      J=6.1 μJ

      Laser ablation

      Nanopillar diameter

      of 800 nm, and

      height of 15 μm

      19∶1
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    Lijia Xu, Qingsong Wang, Xiaofang Fu, Qi Zhang, Qiong He, Zeyu Zhao, Xiangang Luo. Optical Fabrication Technology Based on Vector Optical Field (Invited)[J]. Chinese Journal of Lasers, 2024, 51(12): 1202403

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    Paper Information

    Category: Laser Micro-Nano Manufacturing

    Received: Apr. 15, 2024

    Accepted: May. 31, 2024

    Published Online: Jun. 24, 2024

    The Author Email: Zhao Zeyu (john116@126.com)

    DOI:10.3788/CJL240775

    CSTR:32183.14.CJL240775

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