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Laser & Infrared, Volume. 55, Issue 6, 914(2025)

A theoretical design of high absorptivity and quick response microbolometer

LI Jun-li1, YUAN Jun2、*, YAO Hao-qiang1, YANG Fan1, and TANG Zhao-huan1
Author Affiliations
  • 1United Microelectronics Center, Chongqing 410000, China
  • 2College of Materials Science and Engineering, Chongqing University, Chongqing 400044, China
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    [2] [2] Michel M, Blaeser S, Litke A, et al. Capabilities of scaled microbolometers for uncooled thermal imaging below 10m pixel pitch[C]//Infrared Technology and Applications XLIX. Orlando, Florida: SPIE, 2023: 1253419.

    [3] [3] Kwon M H, Jeon S K, Kang S G, et al. TiOx-based uncooled 8 m FPA development at i3system[C]//Infrared Technology and Applications XLIX. Orlando, Florida: SPIE, 2023: 125341C.

    [4] [4] Guillaumont M, Altazina S, Cardoso A, et al. Recent thermoresistive material evolutions at LYNRED for improving uncooled microbolometer products thermal sensitivity[C]//Infrared Technology and Applications XLVIII. Orlando, Florida: SPIE, 2022: 1210716.

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    LI Jun-li, YUAN Jun, YAO Hao-qiang, YANG Fan, TANG Zhao-huan. A theoretical design of high absorptivity and quick response microbolometer[J]. Laser & Infrared, 2025, 55(6): 914

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    Paper Information

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    Received: Feb. 26, 2025

    Accepted: Jul. 30, 2025

    Published Online: Jul. 30, 2025

    The Author Email: YUAN Jun (80094396@qq.com)

    DOI:10.3969/j.issn.1001-5078.2025.06.013

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology