Laser & Infrared, Volume. 55, Issue 6, 914(2025)
A theoretical design of high absorptivity and quick response microbolometer
To solve the difficult problem of large thermal response time, low absorptivity in small microbolometer pixel, a new pixel structure is proposed and designed, with small width bridge leg, quick response time and high absorptivity. By meta-surface and partial umbrella structure, the performance of high absorptivity and detective sensitivity is achieved. The thermal response time is reduced by partial umbrella design, which is theoretically calculated and simulated. Finally, a microbolometer pixel is acquired, with average absorptivity 96.8%, NETD 55 mK and thermal response time 3.8 ms, based on 8~16 μm. Thesynthesis performance is approximately 209 mK·ms.
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LI Jun-li, YUAN Jun, YAO Hao-qiang, YANG Fan, TANG Zhao-huan. A theoretical design of high absorptivity and quick response microbolometer[J]. Laser & Infrared, 2025, 55(6): 914
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Received: Feb. 26, 2025
Accepted: Jul. 30, 2025
Published Online: Jul. 30, 2025
The Author Email: YUAN Jun (80094396@qq.com)