Laser & Infrared, Volume. 55, Issue 6, 914(2025)

A theoretical design of high absorptivity and quick response microbolometer

LI Jun-li1, YUAN Jun2、*, YAO Hao-qiang1, YANG Fan1, and TANG Zhao-huan1
Author Affiliations
  • 1United Microelectronics Center, Chongqing 410000, China
  • 2College of Materials Science and Engineering, Chongqing University, Chongqing 400044, China
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    To solve the difficult problem of large thermal response time, low absorptivity in small microbolometer pixel, a new pixel structure is proposed and designed, with small width bridge leg, quick response time and high absorptivity. By meta-surface and partial umbrella structure, the performance of high absorptivity and detective sensitivity is achieved. The thermal response time is reduced by partial umbrella design, which is theoretically calculated and simulated. Finally, a microbolometer pixel is acquired, with average absorptivity 96.8%, NETD 55 mK and thermal response time 3.8 ms, based on 8~16 μm. Thesynthesis performance is approximately 209 mK·ms.

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    LI Jun-li, YUAN Jun, YAO Hao-qiang, YANG Fan, TANG Zhao-huan. A theoretical design of high absorptivity and quick response microbolometer[J]. Laser & Infrared, 2025, 55(6): 914

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    Paper Information

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    Received: Feb. 26, 2025

    Accepted: Jul. 30, 2025

    Published Online: Jul. 30, 2025

    The Author Email: YUAN Jun (80094396@qq.com)

    DOI:10.3969/j.issn.1001-5078.2025.06.013

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