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Opto-Electronic Engineering, Volume. 45, Issue 3, 170698(2018)

Development and characterization of a 140-element MEMS deformable mirror

Wang Weimin1,2、* and Wang Qiang1,3
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    Wang Weimin, Wang Qiang. Development and characterization of a 140-element MEMS deformable mirror[J]. Opto-Electronic Engineering, 2018, 45(3): 170698

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    Paper Information

    Category: Article

    Received: Dec. 19, 2017

    Accepted: --

    Published Online: May. 3, 2018

    The Author Email: Weimin Wang (weiminwang@qq.com)

    DOI:10.12086/oee.2018.170698

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology