Acta Optica Sinica, Volume. 33, Issue 9, 922003(2013)
Nanodots Pattern and Optical Properties of Monocrystalline Silicon Induced by Low Energy Ion Beam
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Chen Zhili, Liu Weiguo. Nanodots Pattern and Optical Properties of Monocrystalline Silicon Induced by Low Energy Ion Beam[J]. Acta Optica Sinica, 2013, 33(9): 922003
Category: Optical Design and Fabrication
Received: Mar. 15, 2013
Accepted: --
Published Online: Aug. 15, 2013
The Author Email: Chen Zhili (medichen@163.com)