[3] [3] Yang Hangzhou, Qiao Xueguang, Luo Dong, et al. A review of recent developed and applications of plastic fiber optic displacement sensors［J］. Measurement,2014,48:333-345.

[4] [4] Hu Pengcheng, Chang Di, Tan Jiubin. et al. Displacement measuring grating interferometer: a review［J］. Frontiers of Information Technology & Electronic Engineering,2019,20(5):631-654.

[5] [5] Ishikawa I, Sawada R, Higurashi E. et al. Integrated micro-displacement sensor that measures tilting angle and linear movement of an external mirror［J］. Sensors and Actuators A Physical,2007,138(2):269-275.

[7] [7] Ye Y, Zhang C, He C. et al. A review on applications of capacitive displacement sensing for capacitive proximity sensor［J］. IEEE Access,2020,PP8(99):145325-145342.

[8] [8] Li Xinghui, Wang Huanhuan, Ni Kai et al. Two-probe optical encoder for absolute positioning of precision stages by using an improved scale grating［J］. Optics Express,2016,24(19):21378-91.

[10] [10] Lin Jie, Guan Jian, Wen Feng. et al. High-resolution and wide range displacement measurement based on planar grating［J］. Optics Communications,2017,404:132-138.

[11] [11] Li Mengwei, Liang Zhouxin, Zhang Rui. et al. Large-scale range diffraction grating displacement sensor based on polarization phase-shifting［J］. Applied Optics,2020,59(2):469-473.

[12] [12] Arnold,Teimel. Technologyandapplications of grating interferometers in high-precision measurement［J］. Precision Engineering,1992,14(3):147-154.

[13] [13] HaqueM A, Espinosa H D, LeeH J. MEMS for In situ testing-handling, actuation, loading, and displacement measurements［J］. Mrs Bulletin,2010,35(5):375-381.

[14] [14] Iqbal S, Malik A. A review on MEMS based micro displacement amplification mechanisms［J］. Sensors and Actuators A Physical,2019,300:111666.

[15] [15] Rayleigh, Lord. XXV. On copying diffraction-gratings, and on some phenomena connected therewith［J］. Philosophical Magazine,2009,11(67):196-205.

[17] [17] Kim M S, Scharf T, Menzel C. et al. Talbot images of wavelength-scale amplitude gratings［J］. Optics Express,2012,20(5):4903-20.