Optical Technique, Volume. 47, Issue 6, 689(2021)
Research on applications of Self-imaging effect in double optical grating structure for displacement measuring
Recent interest in high-precision machining for mechanical devices and semiconductor devices has created a compelling need for miniaturization of displacement measuring devices with high performance. Here a new method for displacement measurement based on self-imaging effect in a double-optical-micrograting structure is proposed. Optical field distribution behind an optical micrograting with period of~6.5μm is analyzed theoretically. And transmission properties of the double grating are investigated. Sinusoidal signals are obtained within a range of 1mm experimentally. Using a subdivision process with a multiple factor of 100, displacement measurement with resolution of 64.5nm is demonstrated. Benefitting from acompact structure and a high stability, the method shows great potential in applications such as miniaturized displacement measuring devices and systems.
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XIN Chenguang, QI Jie, ZHANG Rui, JIN Li, CAO Bin, LI Mengwei. Research on applications of Self-imaging effect in double optical grating structure for displacement measuring[J]. Optical Technique, 2021, 47(6): 689