[2] [2] Wangner P, Gerber H A, Graf D et al.. Morphology of silicon wafersurface: A comparative study with atomic force microscope and other techniques. Proc. SPIE, 1996, 2862:18～27

[7] [7] Dumas P, Bouffakhreddine B, Amra C et al.. Quantitative microroughness analysis down to the nanometer scale. Europhys. Lett., 1993, 22(9):717～722

[8] [8] Rasigni G, Varner F, Rasigni M et al.. Autocovariance functions for polished optical surfaces. J. Opt. Soc. Am., 1983, 73(2):222～233

[9] [9] Li Jianbai, Li Xiaoyun, Wang Ming et al.. Inspecting on the defect of optical surface using atomic force microscope. J. Optoelectronics Laser, 1998, 9(supp):272～274

[10] [10] Deng Wenli, Yang Daben, Ye Fang et al.. Characterization of self-assembled monolayers of thiols on Au (111). Science in China (Series B), 1996, 39(3):225～234