[1] [1] A. Lubig, Ch. Buchal, D. Guggi et al.. Epitaxial growth of monoclinic and cubic ZrO2 on Si (100) without prior removal of the native SiO2 [J]. Thin Solid Films, 1992, 217：125~128

[2] [2] S. Ben Amor, B. Rogier, G. Baud et al.. Characterization of zirconia films deposited by r.f. magnetron sputtering [J]. Materials Science and Engineering, 1998, B57:28～39

[3] [3] J. S. Kim, H. A. Marzouk, P. J. Reucroft. Deposition and structural characterization of ZrO2 and yttria-stabilized ZrO2 films by chemical vapor deposition [J]. Thin Solid Films, 1995, 254:33～38

[4] [4] R. Guinebretiere, B. Soulestin, A. Dauger. XRD and TEM study of heteroepotaxial growth of zirconia on magnesia single crystal [J]. Thin Solid Films, 1998, 319:197～201

[5] [5] N. Iwamoto, Y. Makino, M. Kamai. Characterization of r.f.-sputtered zirconia coating [J]. Thin Solid Films, 1987, 153:233～241

[6] [6] M. G. Krishna, K. N. Rao, S. Mohan. A comparative study of the optical properties of zirconia thin films prepared by ion-assisted deposition [J]. Thin Solid Films, 1992, 207:248～251

[7] [7] M. Boulouz, A. Boulouz, A. Giani et al.. Influence of substrate temperature and target composition on the properties of yitta-stabilized thin films grown by r.f. reactive magnetron sputtering [J]. Thin Solid Films, 1998, 323:85～92

[8] [8] A. Husmann, J. Gottmann, T. Klotzbücher et al.. Pulsed laser deposition of ceramic thin films using different laser sources[J]. Surface and Coating Technology, 1998, 100～101:411～414

[9] [9] R. Brenier, A. Gagnaire. Densification and aging ZrO2 film prepared by sol-gel [J]. Thin Solid Films, 2001, 392:142～148

[10] [10] A. Mehner, H. Klümper-Westkamp, F. Hoffman et al.. Crystallization and residual stress formation of sol-gel-derived zirconia films [J]. Thin Solid Films, 1997, 308～309:363～368