Chinese Journal of Lasers, Volume. 51, Issue 24, 2402107(2024)

Experimental Study on Picosecond Laser Cutting of Quartz Glass

Yanpu Li, Renchao Liang, Hanpeng Wang, Yi Zhang, and Haiying Wei*
Author Affiliations
  • State Key Laboratory of Advanced Design and Manufacturing Technology for Vehicle, Hunan University, Changsha 410082, Hunan , China
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    Figures & Tables(15)
    Processing light path
    Generation device and transmission process of Bessel beams. (a) Axicon and 4f system; (b) propagation of Bessel beam in different media
    Bessel laser ablation cutting solution. (a) Laser drilling; (b) fracturing glass by external force
    Gaussian laser multi-pass scanning cutting solution
    Schematic of kerf loss width and phase transition region width
    Processed cross-sections under different defocusing distances. (a) -350 μm; (b) -650 μm; (c) -800 μm; (d) -400 μm;
    Relationship between edge chipping size and defocusing distance
    Morphologies of quartz glass after cutting. (a1)‒(a3) Morphologies of surfaces; (b1)‒(b3) morphologies of edges; (c1)‒(c3) cross-section morphologies
    Quartz glass obtained by linear cutting and curved cutting
    Relationship between kerf loss width and single pulse energy
    Relationship between kerf loss width and overlap rate
    Relationship between width of phase transition region and pulse width
    3D morphologies of sections under different pulse widths. (a) 4 ps; (b) 8 ps
    Effect of focus depth on modification effect. (a) Section of quartz glass after cutting; (b) roughness values of three regions under different pulse widths
    • Table 1. Material properties of fused silica glass

      View table

      Table 1. Material properties of fused silica glass

      Density /

      (g/cm3

      Refractive index

      Bending

      resistance /MPa

      Compressive

      strength /MPa

      Thermal conductivity /

      [W/(m·K)]

      Thermal expansion

      coefficient /(10-6/K)

      2.111.456380‒10001.460.5
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    Yanpu Li, Renchao Liang, Hanpeng Wang, Yi Zhang, Haiying Wei. Experimental Study on Picosecond Laser Cutting of Quartz Glass[J]. Chinese Journal of Lasers, 2024, 51(24): 2402107

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    Paper Information

    Category: Laser Forming Manufacturing

    Received: Apr. 1, 2024

    Accepted: Jun. 5, 2024

    Published Online: Dec. 10, 2024

    The Author Email: Wei Haiying (why@hnu.edu.cn)

    DOI:10.3788/CJL240732

    CSTR:32183.14.CJL240732

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