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Chinese Journal of Lasers, Volume. 37, Issue S1, 252(2010)

Research on Ultra Precision Positioning Control System

Liu Yang1、*, Zhang Jinlong1, Liu Jingnan2, and Yoshihisa Uchida3
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    Liu Yang, Zhang Jinlong, Liu Jingnan, Yoshihisa Uchida. Research on Ultra Precision Positioning Control System[J]. Chinese Journal of Lasers, 2010, 37(S1): 252

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    Paper Information

    Category: Measurement and metrology

    Received: Mar. 16, 2010

    Accepted: --

    Published Online: Oct. 29, 2010

    The Author Email: Yang Liu (rousowy@163.com)

    DOI:10.3788/cjl201037s1.0252

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology