Chinese Journal of Lasers, Volume. 15, Issue 11, 701(1988)
Fabrication of SOI structure by means of laser annealed neutron-irradiated single crystal silicon
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Wang Shen, Li Qiong, Lin Chenglu. Fabrication of SOI structure by means of laser annealed neutron-irradiated single crystal silicon[J]. Chinese Journal of Lasers, 1988, 15(11): 701
Category: laser manufacturing
Received: --
Accepted: --
Published Online: Aug. 13, 2012
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CSTR:32186.14.