Fig. 1. Schematics of layered filling models for different taper micro-holes. (a) Positive taper; (b) zero taper; (c) negative taper

Fig. 2. Structural diagram of micro-hole processing system with double galvanometer groups

Fig. 3. Schematics of controlling beam by using two galvanometers. (a) Three types of beam focusing patterns; (b) schematic of focusing position

Fig. 4. Effect of shift distance of beam on micro-hole taper. (a) d is smaller than beam diameter; (b) d is equal to beam diameter; (c) d is larger than beam diameter

Fig. 5. Micro-hole processing system with double galvanometer groups

Fig. 6. Front and back views of micro-holes with different tapers under different beam shift distances. (a) Positive taper, d=700 μm; (b) zero taper, d=1300 μm; (c) negative taper, d=2000 μm

Fig. 7. Micro-hole cross sections under different d. (a) d=700 μm; (b) d=1300 μm; (c) d=2000 μm

Fig. 8. Front and back views of micro-holes with different hole sizes. (a) 36 μm; (b) 72 μm

Fig. 9. Micro-holes with different shapes. (a) Triangle;(b) quadrilateral; (c) pentagon; (d) hexagon