[1] [1] Boroff N. Recent advances in displacement measuring interferometry. Meas. Sci. Technol., 1992, 3(10):953～958

[2] [2] Baldwin R R, Siddal G J. A Double pass attachment for the linear and plane mirror interferometer. Proc. SPIE, 1984, 480:80～87

[3] [3] Downs M J. A proposed design for an optical interferometer with sub-nanometer resolution. Nanotechnology, 1990, 1(1):27～30

[4] [4] Downs M J, Nunn J W. Verification of the sub-nanometric capability of an NPL differential plane mirror interferometer with a capacitance probe. Meas. Sci. Technol., 1998, 9(9):1437～1440

[5] [5] Heydemann P L M. Determination and correction of quadrature fringe measurement errors in interferometers. Appl. Opt., 1981, 20(19):3382～3384

[6] [6] Boroff N. Residual errors in laser interferometry from air turbulence and nonlinearity.Appl.Opt.,1987,26(13):2676～2681

[7] [7] Birch K P. Optical fringe subdivision with nanometric accuracy. Precision Engng., 1990, 12(4):195～198

[8] [8] Wu C M, Su C S. Nonlinearity in measurements of length by optical interferometry. Meas. Sci. Technol., 1996, 7(1):62～68

[9] [9] Wu C M, Su C S, Peng G S. Correction of nonlinearity in one-frequency optical interferometry. Meas. Sci. Technol., 1996, 7(4):520～524

[10] [10] Zhao Z Y, Xu Y M. Introduction to Duzzy Theory and Neural Networks and their Application. Beijing: Tsinghua University Press and Nanning: Guangxi Sci and Tech Press, 1996 (in Chinese)

[11] [11] Si J, Zhou G A, Li H et al.. Theory and applications for the supervised learning method based on gradient algorithms Part Ⅰ: Fundamental algorithm. J. Tsinghua University, 1997, 37(7):71～73

[12] [12] ISO 16063-13:2001, Methods for the calibration of vibration and shock transducers Part 13: Primary shock calibration using laser interferometry

[13] [13] Link A, von Martens H J, Wabinski W. New method for absolute shock calibration of accelerometers. Proc. SPIE, 1998, 3411:224～235