Fig. 1. Single-reflection panoramic imaging system model

Fig. 2. Working principle diagram of the prism. (a) Side view; (b) top view

Fig. 3. Schematic of torsion scanning

Fig. 4. Schematic of swing scanning

Fig. 5. Local plane scanning map of the circular strip

Fig. 6. Beam-stirring mechanism for scanning top-view field map

Fig. 7. Three-dimensional model of the beam-mixing system

Fig. 8. Coventor model diagram

Fig. 9. Displacement results. (a) X-directional displacement map; (b) Y-directional displacement map

Fig. 10. Structural stress simulation results. (a) Comprehensive stress chart; (b) details of stress map

Fig. 11. Relationship between comb tooth position and X-direction displacement. (a) Cross-section of straight teeth; (b) cross-section of rotating teeth

Fig. 12. Structural modal simulation. (a) Torsional mode; (b) X-direction vibration; (c) Y-direction vibration

Fig. 13. Process flow of MEMS beam-mixing system