[1] [1] ZHOU W, LIU S Q, CHEN J, et al. 2.4 GHz surface transverse wave resonator filter with low loss and narrowband on quartz［J］. Piezoelectrics & Acoustooptics, 2015, 37(3): 405-407.

[2] [2] YANG L P, WANG F, YANG S C, et al. Discussion on application of LBO for high-frequency and narrow-band filters［J］. Piezoelectrics & Acoustooptics, 2014, 36(1):27-31.

[3] [3] MURATA T, KADOTA M, NAKAO T, et al. Radio frequency surface acoustic wave filter having narrow bandwidth and excellent temperature characteristic［J］. Japanese Journal of Applied Physics, 2008, 47(5):4101-4103.

[4] [4] MURATA T, KADOTA M, NAKAO T, et al. Improvement of shape factor and loss of surface acoustic wave resonator filter composed of SiO2/high-density-electrode/LiTaO3［J］.Japanese Journal of Applied Physics, 2009, 48:1-4.

[5] [5] KOMATSU T, TANAKA Y, HASHIMOTO K, et al. Design of narrow bandwidth ladder-type filters with sharp transition bands using mutually connected resonator elements［C］∥［S.1.］: IEEE Ultrason Symp Proc, 2008:1576-1579.

[6] [6] CHEN X Y, SU B, YE Z, et al. Simulation and design technology of TC-SAW filter［J］. Piezoelectrics & Acoustooptics, 2023, 45(4):560-565.

[7] [7] KOVACS G, ANHORN M, ENGAN H E, et al. Improved material constants for LiNbO3 and LiTaO3［C］∥［S.1.］: IEEE Ultrason Symp Proc, 1990:435-438.

[8] [8] SMITH R T, WELSH F S. Temperature dependence of the elastic, piezoelectric, and dielectric constants of Lithium Tantalate and Lithium Niobate［J］. Journal of Applied Physics, 1971, 42(6):2219-2230.

[9] [9] WU P, EMANETOGLU N W, TONG X, et al. Temperature compensation of SAW in ZnO/SiO2/Si structure［C］∥［S.1.］: IEEE Ultrason Symp Proc, 2001:211-214.

[10] [10] BUTAUD E, TAVEL B, BALLANDRAS S, et al. Smart cutTM piezo on insulator(POI) substrates for high performances SAW components［C］∥［S.1.］: IEEE Ultrason Symp Proc, 2020:1-4.

[11] [11] TAKAI T, IWAMOTO H, TAKAMINE Y, et al. High performance SAW resonator with simplified LiTaO3/SiO2 double layer structure on Si substrate［C］∥［S.1.］: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2019:1006-1013.