Design of 0.35 μm Step-and-Repeat Projection Lithography Objective

Acta Optica Sinica, Volume. 20, Issue 8, 1148(2000)

[in Chinese] and [in Chinese]

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[in Chinese], [in Chinese]. Design of 0.35 μm Step-and-Repeat Projection Lithography Objective[J]. Acta Optica Sinica, 2000, 20(8): 1148

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Category: Rapid communications

Received: Jan. 4, 1999

Accepted: --

Published Online: Aug. 9, 2006

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