Design and Fabrication of the Antireflection Subwavelength Structure of Convex Germanium Optical Window

Fokui Chen; Jiang Ding; Ming Yu; Cui Ma; Hui Lin

doi:10.3788/LOP213148

Laser & Optoelectronics Progress, Volume. 60, Issue 5, 0522001(2023)

Design and Fabrication of the Antireflection Subwavelength Structure of Convex Germanium Optical Window

Fokui Chen^1,2, Jiang Ding¹, Ming Yu², Cui Ma², and Hui Lin^2、*

Author Affiliations

¹School of Mechanical Engineering, Guangxi University, Nanning 530004, Guangxi, China

²Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, Shenzhen 518055, Guangdong, China

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Figures & Tables(12)

$Effective-medium theory. (a) Single layer; (b) graded refraction index layer$

Fig. 1. Effective-medium theory. (a) Single layer; (b) graded refraction index layer

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Fig. 2. Schematic diagram of the Ge optical window with SWS

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Fig. 3. Curve of the average single-side transmittance of Ge Window with different cylinder heights

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Fig. 4. Single-side transmittance of Ge Window with different cylinder diameters

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Fig. 5. Physical image and SEM photomicrograph of the master mold

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Fig. 6. Process of fabricating the PDMS soft mold

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Fig. 7. Schematic of process of soft UV-NIL

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Fig. 8. Physical image of the platform and samples before and after embossing. (a) Platform of the soft UV-NIL; (b) convex Ge window before embossing; (c) convex Ge window after embossing

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Fig. 9. SEM photomicrograph of the antireflection SWS

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Fig. 10. Transmittance of the Ge convex optical window before and after patterning. (a) Double-side transmittance; (b) single-side transmittance

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Table 1. Designed parameters of the master mold and the antireflection structure
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Table 1. Designed parameters of the master mold and the antireflection structure
Parameter $T$ /μm $D$ /μm $H$ /μm
Mastermold 2.2 1.15 1.3
Antireflection coating 2.3 1.2 1.2

Table 2. Design and real parameters of the antireflection SWS
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Table 2. Design and real parameters of the antireflection SWS
Value $h$ $D$ $H$ $T$
Designed value 8 1.2 1.2 2.3
Real value 8 $\pm$ 0.5 1.2 $\pm$ 0.05 1.2 $\pm$ 0.05 2.3 $\pm$ 0.05

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Fokui Chen, Jiang Ding, Ming Yu, Cui Ma, Hui Lin. Design and Fabrication of the Antireflection Subwavelength Structure of Convex Germanium Optical Window[J]. Laser & Optoelectronics Progress, 2023, 60(5): 0522001

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