Journal of Synthetic Crystals, Volume. 54, Issue 3, 462(2025)

Preparation of Ga2O3∶Si Thin Films and Study on the Performance of Its Solar-Blind Ultraviolet Photodetectors

ZHANG Xian, YUE Zhiang, ZHAO Enqin, WEI Shuaikang, YE Wenxuan, HUANG Minyi, XIN Meibo, ZHAO Yang, and WANG Hui*
Author Affiliations
  • Henan Key Laboratory of Photoelectric Energy Storage Materials and Applications, School of Physics and Engineering, Henan University of Science and Technology, Luoyang 471023, China
  • show less
    References(22)

    [1] [1] SUN X Y, CHEN X H, HAO J G, et al. A self-powered solar-blind photodetector based on polyaniline/-Ga2O3 p-n heterojunction[J]. Applied Physics Letters, 2021, 119(14): 141601.

    [2] [2] HOU H Y, TIAN S, CHEN J D, et al. Spectrally selective hole extraction structure enables a self-powered perovskite solar-blind photodetector with record responsivity and detectivity[J]. Advanced Optical Materials, 2024, 12(7): 2301964.

    [3] [3] GUO D Y, SU Y L, SHI H Z, et al. Self-powered ultraviolet photodetector with superhigh photoresponsivity (3.05 A/W) based on the GaN/Sn∶ Ga2O3 pn junction[J]. ACS Nano, 2018, 12(12): 12827-12835.

    [4] [4] CHEN W J, MA H P, GU L, et al. Influence of annealing pretreatment in different atmospheres on crystallization quality and UV photosensitivity of gallium oxide films[J]. RSC Advances, 2024, 14(7): 4543-4555.

    [5] [5] YU M, WANG H Q, WEI W, et al. Analysis of electronic structure and properties of Ga2O3/CuAlO2 heterojunction[J]. Applied Surface Science, 2021, 568: 150826.

    [6] [6] ZHANG X, YUE Z A, XIANG G J, et al. Ultra-violet and yellow-green emissions under intriguing bidirectional DC driving based on Au/i-Ga2O3/n-GaN MIS heterojunction light-emitting diodes[J]. Journal of Materials Chemistry C, 2023, 11(45): 16026-16036.

    [7] [7] ZHU H Y, CHEN X C, FAN Q X, et al. Ultrasensitive dual-junction-coupled n-ZnO/n-Ga2O3/p-GaN-based self-driven broad-band ultraviolet photodetector[J]. ACS Photonics, 2024, 11(3): 1293-1302.

    [8] [8] WANG Z W, HAN K J, HUANG H, et al. Interface-engineering induced swift and controllable solar-blind photoresponse in Ga2O3/SiC heterojunction based on unconventional rectification characteristics[J]. Advanced Functional Materials, 2024, 34(33): 2400498.

    [9] [9] KUMAR N, PATEL M, KIM J, et al. Flexible transparent photovoltaics for ultra-UV photodetection and functional UV-shielding based on Ga2O3/Cu2O heterojunction[J]. Applied Materials Today, 2022, 29: 101620.

    [10] [10] CHEN R R, WANG D, FENG B, et al. High responsivity self-powered DUV photodetectors based on -Ga2O3/GaN heterogeneous PN junctions[J]. Vacuum, 2023, 215: 112332.

    [11] [11] LIU Y, ZHOU Y J, PENG W B, et al. Enhanced ultraviolet electroluminescence performance from p-NiO/n-GaN heterojunctions by using i-Ga2O3 as electron blocking layer[J]. Optik, 2022, 262: 169362.

    [12] [12] MOBTAKERI S, AKALTUN Y, ALI , et al. Gallium oxide films deposition by RF magnetron sputtering; a detailed analysis on the effects of deposition pressure and sputtering power and annealing[J]. Ceramics International, 2021, 47(2): 1721-1727.

    [13] [13] CHA S Y, KIM D, LIM H, et al. Characterization of non-stoichiometric Ga2O3-x thin films grown by radio-frequency powder sputtering[J]. Ceramics International, 2021, 47(3): 3238-3243.

    [14] [14] QIN H, LIU H F, LEI C X. Influence of sputtering gas pressure on properties of transparent conducting Si-doped zinc oxide films[J]. International Journal of Materials Research, 2013, 104(10): 1013-1019.

    [15] [15] MA J Y, WANG Q, LI L L, et al. Fe2O3 nanorods/CuO nanoparticles p-n heterojunction photoanode: effective charge separation and enhanced photoelectrochemical properties[J]. Journal of Colloid and Interface Science, 2021, 602: 32-42.

    [16] [16] DU S Y, YU N S, LIN X, et al. High performance ultraviolet A/ultraviolet C detector based on amorphous Ga2O3/ZnO Nanoarrays/GaN structure[J]. Physica E: Low-Dimensional Systems and Nanostructures, 2022, 144: 115398.

    [17] [17] ZHANG N, WANG Y S, CHEN Z H, et al. Fabrication and properties of N-doped top layer of Ga2O3 films by magnetron sputtering[J]. Applied Surface Science, 2022, 604: 154666.

    [18] [18] ZENG L H, HAN W, REN X Y, et al. Uncooled mid-infrared sensing enabled by chip-integrated low-temperature-grown 2D PdTe2 Dirac semimetal[J]. Nano Letters, 2023, 23(17): 8241-8248.

    [19] [19] ZENG L H, WU D, JIE J S, et al. van der Waals epitaxial growth of mosaic-like 2D platinum ditelluride layers for room-temperature mid-infrared photodetection up to 10.6 m[J]. Advanced Materials, 2020, 32(52): 2004412.

    [20] [20] YUE Z A, ZHANG X, ZHAO E Q, et al. Bidirectional UV/violet heterojunction light-emitting diode with In0.27Al0.73N alloy film as electron transport layer[J]. Journal of Alloys and Compounds, 2024, 1001: 175193.

    [21] [21] ZHANG X, YUE Z A, XIANG G J, et al. The influence of deposition pressure on the physical properties of Ga2O3 films and the high responsivity self-powered DUV photodetector based on n-Ga2O3/CuO/p-GaN heterojunction[J]. Optics & Laser Technology, 2025, 180: 111533.

    [22] [22] WANG J J, JI X Q, QI S, et al. Regulation of oxygen vacancies in nitrogen-doped Ga2O3 films for high-performance MSM solar-blind UV photodetectors[J]. Journal of Materials Chemistry C, 2023, 11(18): 6202-6211.

    Tools

    Get Citation

    Copy Citation Text

    ZHANG Xian, YUE Zhiang, ZHAO Enqin, WEI Shuaikang, YE Wenxuan, HUANG Minyi, XIN Meibo, ZHAO Yang, WANG Hui. Preparation of Ga2O3∶Si Thin Films and Study on the Performance of Its Solar-Blind Ultraviolet Photodetectors[J]. Journal of Synthetic Crystals, 2025, 54(3): 462

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Nov. 19, 2024

    Accepted: Apr. 23, 2025

    Published Online: Apr. 23, 2025

    The Author Email: WANG Hui (wanghui08@haust.edu.cn)

    DOI:10.16553/j.cnki.issn1000-985x.2024.0289

    Topics