Laser & Optoelectronics Progress, Volume. 57, Issue 14, 140001(2020)

Review on Development of Nano-Computed Tomography Imaging Technology

Hanyu Lü1, Jing Zou1,2、*, Jintao Zhao1, and Xiaodong Hu1,2
Author Affiliations
  • 1State Key Laboratory of Precision Testing Techniques and Instrument, School of Precision Instrument and Optoelectronics Engineering, Tianjin University, Tianjin 300072, China
  • 2Nanchang Institute for Microtechnology of Tianjin University, Tianjin 300072, China
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    Figures & Tables(14)
    Principle of projection magnification imaging
    Schematic diagram of nano-CT imaging using modified SEM device[9]. (a) Optical path diagram of X-ray point source projection magnification; (b) main structure and components of modified SEM for obtaining nano-light source; (c) geometric principle of cone-beam CT imaging system; (d) virtual cross section of tomographic dataset
    Structural diagram of coupling of fiber and detector[27]
    Structural diagram of coupling of lens and detector[29]
    Comparison of optical microscope and X-ray microscope. (a) Imaging schematic of visible light microscope; (b) imaging schematic of soft X-ray microscopy; (c) imaging schematic of hard X-ray microscope
    X-ray nano CT imaging system with zone plate[39]
    Structural diagram of zone plate. (a) Structural diagram of classical zone plate; (b) structural diagram of multilayer film Laue mirror[48]
    Structural diagram of composite lens. (a) Planar composite refractive lens; (b) spherical composite refractive lens[91]
    Schematic diagram of elliptical type Bragg amplifier[95]
    Diagram of structure of X-ray Bragg amplifier[96]
    Schematic diagram of capillary focusing
    Single capillary focusing diagram (left) and multi-capillary focusing diagram (right)
    • Table 1. Classification of nano-CT imaging systems

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      Table 1. Classification of nano-CT imaging systems

      PrincipleType
      Imaging principleAbsorbing contrast based nano-CT
      Phase contrast based nano-CT
      Property of X-rayHard X-ray nano-CT
      Soft X-ray nano-CT
      AmplificationmechanismProjection magnifying nano-CT
      X-ray microscopy nano-CT
    • Table 2. Classification and important parameters of common X-ray focusing components

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      Table 2. Classification and important parameters of common X-ray focusing components

      CategoryComponentBeam diameter /nmEnergy /keVEfficiency /%Ref. No
      DiffractingFresnel zone plates35810-70[24,38-45]
      Multilayer zone plates513.810-20[13,46-47]
      Multilayer Laue lenses1014.610-30[48-54]
      AbsorbingPinholes/slits100011[55-56]
      ReflectingCapillaries50880[12,57-59]
      Waveguides1015<25[25,60]
      Kirkpatrick-Baez mirrors720>50[52,61-63]
      RefractingSpherical compound refractive lenses10008several 10%[11, 63-64]
      Parabolic compound refractive lenses5021>60[26,65-70]
      Kinoform lenses1008>50[71-72]
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    Hanyu Lü, Jing Zou, Jintao Zhao, Xiaodong Hu. Review on Development of Nano-Computed Tomography Imaging Technology[J]. Laser & Optoelectronics Progress, 2020, 57(14): 140001

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    Paper Information

    Category: Reviews

    Received: Dec. 31, 2019

    Accepted: Feb. 25, 2020

    Published Online: Jul. 23, 2020

    The Author Email: Jing Zou (jingzoutd@tju.edu.cn)

    DOI:10.3788/LOP57.140001

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