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Acta Optica Sinica, Volume. 45, Issue 9, 0912002(2025)

Long-Cycle Pressure Measurement of Lithium-Ion Batteries Based on Au-Au Bonding High-Precision Fiber-Optic Sensors

Ke Tan1, Shuang Wang1,2、*, Yuxi Chu3, Xuesong Xiang1, Junfeng Jiang4, and Tiegen Liu4
Author Affiliations
  • 1State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China
  • 2Key Laboratory of Optical Fiber Sensing Metrology and Measurement, State Administration for Market Regulation, Tianjin University, Tianjin 300072, China
  • 3Tianjin Fire Science and Technology Research Institute, Ministry of Emergency Management, Tianjin 300381, China
  • 4Key Laboratory of Optoelectronic Information Technology, Ministry of Education, Tianjin University, Tianjin 300072, China
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    AbstractGet PDF(in Chinese)
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    Figures & Tables(12)
    Structure and principle of MEMS fiber-optic pressure sensor. (a) Structure of the sensor; (b) optical path transmission model of the sensor

    Fig. 1. Structure and principle of MEMS fiber-optic pressure sensor. (a) Structure of the sensor; (b) optical path transmission model of the sensor

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    PLCI-based demodulation system for MEMS fiber-optic sensor

    Fig. 2. PLCI-based demodulation system for MEMS fiber-optic sensor

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    Fabrication process of MEMS pressure sensitive components. (a) Double-sided evaporation of Cr/Au thin films; (b) coat photoresist and attach a photomask; (c) etch the micro-cavity; (d) deposit an optical film; (e) evaporation of Cr/Au thin films; (f) Au-Au thermocompression bonding; (g) remove the top silicon layer and the buried oxide layer

    Fig. 3. Fabrication process of MEMS pressure sensitive components. (a) Double-sided evaporation of Cr/Au thin films; (b) coat photoresist and attach a photomask; (c) etch the micro-cavity; (d) deposit an optical film; (e) evaporation of Cr/Au thin films; (f) Au-Au thermocompression bonding; (g) remove the top silicon layer and the buried oxide layer

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    MEMS pressure sensitive element and physical fiber-optic sensor. (a) MEMS pressure sensitive element; (b) physical fiber-optic sensor

    Fig. 4. MEMS pressure sensitive element and physical fiber-optic sensor. (a) MEMS pressure sensitive element; (b) physical fiber-optic sensor

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    Response results of temperature and pressure of MEMS fiber-optic sensor. (a) Spectral signal change of sensor; (b) pressure response results of sensor at -40‒60 ℃; (c) pressure response characteristics of the same batch of sensors

    Fig. 5. Response results of temperature and pressure of MEMS fiber-optic sensor. (a) Spectral signal change of sensor; (b) pressure response results of sensor at -40‒60 ℃; (c) pressure response characteristics of the same batch of sensors

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    Measurement errors on MEMS fiber-optic sensors for pressure measurement. (a) -40 ℃; (b) -20 ℃; (c) 0 ℃; (d) 20 ℃; (e) 40 ℃; (f) 60 ℃

    Fig. 6. Measurement errors on MEMS fiber-optic sensors for pressure measurement. (a) -40 ℃; (b) -20 ℃; (c) 0 ℃; (d) 20 ℃; (e) 40 ℃; (f) 60 ℃

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    Schematic of the experimental system for in-situ battery monitoring based on MEMS fiber-optic sensor

    Fig. 7. Schematic of the experimental system for in-situ battery monitoring based on MEMS fiber-optic sensor

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    Experimental results of in-situ battery monitoring during the charge/discharge cycles at 1 C rate. (a) Response characteristics of the battery in terms of current, voltage and gas pressure over 40 charge/discharge cycles; (b) correlation between voltage and gas pressure of the battery during a charge/discharge cycle; (c) correlation between battery capacity and cyclic gas pressure baseline and peak over 40 charge/discharge cycles

    Fig. 8. Experimental results of in-situ battery monitoring during the charge/discharge cycles at 1 C rate. (a) Response characteristics of the battery in terms of current, voltage and gas pressure over 40 charge/discharge cycles; (b) correlation between voltage and gas pressure of the battery during a charge/discharge cycle; (c) correlation between battery capacity and cyclic gas pressure baseline and peak over 40 charge/discharge cycles

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    Change of the spectral signal of the MEMS fiber-optic sensor under different charge/discharge cycles of the battery

    Fig. 9. Change of the spectral signal of the MEMS fiber-optic sensor under different charge/discharge cycles of the battery

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    Experimental results of in-situ battery monitoring during the charge/discharge cycles at 2 C rate. (a) Response characteristics of the battery in terms of current, voltage and gas pressure over 40 charge/discharge cycles; (b) correlation between voltage and gas pressure of the battery during a charge/discharge cycle; (c) correlation between battery capacity and cyclic gas pressure baseline and peak over 40 charge/discharge cycles

    Fig. 10. Experimental results of in-situ battery monitoring during the charge/discharge cycles at 2 C rate. (a) Response characteristics of the battery in terms of current, voltage and gas pressure over 40 charge/discharge cycles; (b) correlation between voltage and gas pressure of the battery during a charge/discharge cycle; (c) correlation between battery capacity and cyclic gas pressure baseline and peak over 40 charge/discharge cycles

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    • Table 1. Specification parameters for LIBs

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      Table 1. Specification parameters for LIBs

      ItemValue
      CathodeLiFePO4 （LFP）
      AnodeGraphite
      Nominal capacity /mAh1500
      Nominal voltage /V3.20
      Charge cut-off voltage /V3.65
      Discharge cut-off voltage /V2.00
      Dimensions （diameter×height） /（mm×mm）18×65

    • Table 2. Specific experimental procedure for LIBs charge/discharge cycle test

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      Table 2. Specific experimental procedure for LIBs charge/discharge cycle test

      StepParameterTermination criterion
      CC chargeI=1500 mAV=3.65 V
      CV chargeV=3.65 VI=30 mA
      Pause—T=15 min
      CC dischargeI=-1500 mAV=2.00 V
      Pause—T=15 min
      CC/CV charge/discharge cycles—Cycle number is 40 times
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    Ke Tan, Shuang Wang, Yuxi Chu, Xuesong Xiang, Junfeng Jiang, Tiegen Liu. Long-Cycle Pressure Measurement of Lithium-Ion Batteries Based on Au-Au Bonding High-Precision Fiber-Optic Sensors[J]. Acta Optica Sinica, 2025, 45(9): 0912002

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Dec. 18, 2024

    Accepted: Mar. 23, 2025

    Published Online: May. 16, 2025

    The Author Email: Shuang Wang (shuangwang@tju.edu.cn)

    DOI:10.3788/AOS241908

    CSTR:32393.14.AOS241908

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology