Researching | Fabrication of Zero order Nulled Silica Phase Masks for 248 nm KrF Excimer Laser

Chinese Journal of Lasers, Volume. 24, Issue 7, 623(1997)

Fabrication of Zero order Nulled Silica Phase Masks for 248 nm KrF Excimer Laser

[in Chinese]¹, [in Chinese]², [in Chinese]², [in Chinese]¹, and [in Chinese]²

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¹[in Chinese]

²[in Chinese]

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[1] LIU Quan, HUANG Shuang-shuang, LU Jin-chao, CHEN Xin-hua, WU Jian-hong. Phase mask for fabrication of fiber Bragg gratings by femtosecond laser[J]. Optics and Precision Engineering, 2020, 28(4): 844

[2] Liu Quan, Wu Jianhong, Yang Weipeng, Fang Lingling. Fabrication of Linearly Chirped Phase Mask[J]. Chinese Journal of Lasers, 2009, 36(3): 677

[3] LIU Quan, HUANG Shuang-shuang, LU Jin-chao, CHEN Xin-hua, WU Jian-hong. Phase mask for fabrication of fiber Bragg gratings by femtosecond laser[J]. Optics and Precision Engineering, 2020, 28(4): 844

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication of Zero order Nulled Silica Phase Masks for 248 nm KrF Excimer Laser[J]. Chinese Journal of Lasers, 1997, 24(7): 623

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Received: May. 20, 1996

Accepted: --

Published Online: Oct. 31, 2006

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Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology