[1] [1] Hawryluk A M, Ceglio N M, Stearns D G et al.. Soft X-ray beamspliters and highly dispersive multilayer mirrors for use as soft X-ray laser cavity components. Proc. SPIE, 1986, 688:81～90

[4] [4] Michette A G. Optical systems for soft X-rays. New York: Plenum Press, 1986. 95～110

[5] [5] Hawryluk A M, Ceglio N M, Sterns D G et al.. Applications of microfabrication technology to X-ray laser cavities. J. Vav. Sci. Technol., 1988, B6(6):2153～2157

[8] [8] Yuan Lixiang, Fan Zhengxiu, Cui Mingqi et al.. Soft X-ray phase modulation multilayer dispersive element. Opt. Engng., 1995, 34(5):1508～1511