Optics and Precision Engineering, Volume. 16, Issue 7, 1213(2008)
Novel process for fabrication of RF MEMS switch with high mechanical reliability
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HU Guang-wei, LIU Ze-wen, HOU Zhi-hao, LI Zhi-jian. Novel process for fabrication of RF MEMS switch with high mechanical reliability[J]. Optics and Precision Engineering, 2008, 16(7): 1213
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Received: Sep. 12, 2007
Accepted: --
Published Online: Feb. 28, 2010
The Author Email: HU Guang-wei (hgw02@mails.tisnghua.edu.cn)
CSTR:32186.14.
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