Detection of subsurface defects of fused silica optics by confocal scattering microscopy

Bin Ma; Zhengxiang Shen; Pengfei He; Yiqin Ji; Tian Sang; Huasong Liu; Dandan Liu; Zhanshan Wang

doi:10.3788/COL20100803.0296

Chinese Optics Letters, Volume. 8, Issue 3, 296(2010)

Detection of subsurface defects of fused silica optics by confocal scattering microscopy

Bin Ma^1,2,3, Zhengxiang Shen^1,3, Pengfei He², Yiqin Ji³, Tian Sang^1,4, Huasong Liu^1,3, Dandan Liu³, and Zhanshan Wang^1,3

Author Affiliations

¹Institute of Precision Optical Engineering, Tongji University, Shanghai 200092, China

²School of Aerospace Engineering and Applied Mechanics, Tongji University, Shanghai 200092, China

³Tianjin Key Laboratory of Optical Thin Films, Tianjin Jinhang Institute of Technical Physics, Tianjin 300192, China

⁴Department of Physics, Qiannan Normal College for Nationalities, Duyun 558000, China

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CLP Journals

[1] Shizhen Xu, Xiaotao Zu, Xiaodong Yuan, "Localized CO2 laser treatment and post-heating process to reduce the growth coef f icient of fused silica surface damage," Chin. Opt. Lett. 9, 061405 (2011)

Cited By

[1] Chang-Soo Kim, Hongki Yoo. Three-dimensional confocal reflectance microscopy for surface metrology. Measurement Science and Technology, 32, 102002(2021).

[2] I Abdul Rasheed, Swati Paul, Inder Mohan Chhabra, Mahender Kumar Gupta, P Manimaran, Karthikeyan Balasubramanian. Alumina abrasive grains mediated grinding induced glass surface and fractal analysis of SiO2 glass. Engineering Research Express, 3, 025042(2021).

[3] Jing-fei Yin, Qian Bai, Bi Zhang. Methods for Detection of Subsurface Damage: A Review. Chinese Journal of Mechanical Engineering, 31, 41(2018).

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Bin Ma, Zhengxiang Shen, Pengfei He, Yiqin Ji, Tian Sang, Huasong Liu, Dandan Liu, Zhanshan Wang, "Detection of subsurface defects of fused silica optics by confocal scattering microscopy," Chin. Opt. Lett. 8, 296 (2010)

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Paper Information

Received: Jun. 1, 2009

Accepted: --

Published Online: Mar. 11, 2010

The Author Email:

DOI:10.3788/COL20100803.0296

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology