Acta Optica Sinica (Online), Volume. 2, Issue 13, 1304001(2025)
Research Progress on Rare-Earth-Doped Waveguide Amplifiers for Silicon Optical Integration (Invited)
Fig. 1. Gain performance of Er3+/Yb3+ co-doped phosphate planar waveguide amplifier[31]. (a) Internal gain under different 405 nm LED pump power densities; (b) output signal intensity with 275 nm LED pump light on and off
Fig. 2. Structure and gain performance of erbium-doped Al2O3 slot waveguide amplifier[34]. (a) SEM image of the cross-section of silicon nitride slot waveguide; (b) SEM image of the cross-section of the waveguide after depositing Al2O3; (c) signal enhancement of hybrid slot waveguides with lengths of 250, 700, and 1200 μm; calculated (real point) and simulated (solid line) optical gains as functions of pump optical power for hybrid slot waveguide with length of (d) 250 μm, (e) 700 μm, and (f) 1200 μm
Fig. 3. Structure and gain performance of Si3N4∶Er waveguide amplifier[35]. (a) Waveguide amplifier excited by 1480 nm pump light; (b) key manufacturing processes, optical transverse electrical mode diagrams, and SEM images; (c) measured and simulated waveguide gain; (d) output power, with inset of output spectrum
Fig. 4. Schematic diagrams of on-chip LNOI∶Er waveguide amplifier. The insets show pump wavelength and signal wavelength, and mode images around the input and output port of the waveguide[36]
Fig. 5. Schematic diagrams of erbium-doped lithium niobate optical waveguide amplifier[37]. (a) Crystal structure of lithium niobate and the positions of Er3+ in the unit cell; (b) schematic diagrams of waveguide amplifier and signal amplification principle
Fig. 6. Schematic diagrams of experimental setup for measuring gain of erbium chloride silicate[38]. (a) Schematic diagram of gain measurement; (b) schematic diagram of coupling between tapered fiber and both ends of nanowire; (c) top view microscope image of the coupled system
Fig. 8. Structure and gain performance of hybrid optical waveguide amplifier based on lithium-doped erbium ytterbium silicate[42-43]. (a) Schematic diagram of device structure; (b) output signal spectra of waveguide under different pumping powers, with inset of corresponding gains for different pump powers
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Huabao Shang, Deren Yang, Dongsheng Li. Research Progress on Rare-Earth-Doped Waveguide Amplifiers for Silicon Optical Integration (Invited)[J]. Acta Optica Sinica (Online), 2025, 2(13): 1304001
Category: Photonic Integration Technology and Devices
Received: Apr. 24, 2025
Accepted: May. 21, 2025
Published Online: Jul. 2, 2025
The Author Email: Dongsheng Li (mselds@zju.edu.cn)
CSTR:32394.14.AOSOL250452