Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Acta Optica Sinica, Volume. 38, Issue 4, 0412002(2018)

Comparison and Correction of Errors Caused by Radial Phase-Shifting Nonuniformity of Test Optics in Multi-Step Phase-Shifting

Fen Gao1,2、*, Jinping Ni1, Bing Li2, and Ailing Tian1
Author Affiliations
  • 1 School of Optoelectronic Engineering, Xi'an Technological University, Xi'an, Shaanxi 710032, China
  • 2 State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China
    • show less
    AbstractGet PDF(in Chinese)
    Figures&Tables (7)
    Equations (0)
    References (13)
    Cited By (2)
    Tools
    Paper Information
    Topics
    Figures & Tables(7)
    Principle of PSPDI

    Fig. 1. Principle of PSPDI

    Download full size
    Schematic of error caused by radial phase-shifting nonuniformity of optical element to be tested

    Fig. 2. Schematic of error caused by radial phase-shifting nonuniformity of optical element to be tested

    Download full size
    Relation of phase-shifting error with normalized radial distance when shifting one step

    Fig. 3. Relation of phase-shifting error with normalized radial distance when shifting one step

    Download full size
    Figure errors caused by radial phase-shifting nonuniformity of different algorithms when R/D=3.3. (a) 5A and 5B; (b) 6A and 6B; (c) 7A and 7B; (d) 13A and 13B

    Fig. 4. Figure errors caused by radial phase-shifting nonuniformity of different algorithms when R/D=3.3. (a) 5A and 5B; (b) 6A and 6B; (c) 7A and 7B; (d) 13A and 13B

    Download full size
    Residual error distribution after quadratic polynomial correction of different algorithms when R/D=1.67. (a) 5A and 5B; (b) 6A and 6B; (c) 7A and 7B; (d) 13A and 13B

    Fig. 5. Residual error distribution after quadratic polynomial correction of different algorithms when R/D=1.67. (a) 5A and 5B; (b) 6A and 6B; (c) 7A and 7B; (d) 13A and 13B

    Download full size

    • Table 1. PV values of figure errors caused by radial phase-shifting nonuniformity with different R/D values and algorithms

      View table

      Table 1. PV values of figure errors caused by radial phase-shifting nonuniformity with different R/D values and algorithms

      R/DPV value of figure error /nm
      5A5B6A6B7A7B13A13B
      0.6561.290858.258272.636571.636485.893085.6941171.3445171.3443
      1.59.13429.048111.306511.309713.571413.571427.142827.1428
      3.31.82831.82642.28302.28302.73962.73965.47935.4793
      7.10.39280.39280.49100.49100.58920.58921.17831.1783
      10.70.17280.17280.21600.21600.25920.25920.51850.5185

    • Table 2. PV values of residual errors after quadratic polynomial correction

      View table

      Table 2. PV values of residual errors after quadratic polynomial correction

      R/DPV value of residual error /nm
      5A5B6A6B7A7B13A13B
      0.659.11453.67636.38194.98806.44656.270212.489012.4888
      1.50.18420.08720.10510.10810.12950.12950.25890.2589
      3.30.00670.00340.00430.00430.00510.00510.01030.0103
    Tools

    Get Citation

    Copy Citation Text

    Fen Gao, Jinping Ni, Bing Li, Ailing Tian. Comparison and Correction of Errors Caused by Radial Phase-Shifting Nonuniformity of Test Optics in Multi-Step Phase-Shifting[J]. Acta Optica Sinica, 2018, 38(4): 0412002

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Oct. 3, 2017

    Accepted: --

    Published Online: Jul. 10, 2018

    The Author Email: Gao Fen (gaofen8128@163.com)

    DOI:10.3788/AOS201838.0412002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology