Piezoelectrics & Acoustooptics, Volume. 46, Issue 3, 285(2024)

Design and Fabrication of C-Band Laterally Excited Bulk

WU Gaomi1...2,3, MA Jinyi2,3, LI Shangzhi1,2,3, SI Meiju2,3, TANG Xiaolong2,3, JIANG Shiyi2,3, JIANG Hongmin2,3, and ZHANG Zuwei23 |Show fewer author(s)
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    References(5)

    [1] [1] YU Xiaoquan, HE Jie, MA Jinyi.Recent advances and prospects of Lamb wave devices based on piezo-MEMS[J].Piezoelectrics & Acoustooptics, 2022, 44(2):223-229.

    [2] [2] SHAO Shuai, LUO Zhifang, WU Tao.High figure-of-merit Lamb wave resonators based on Al0.7Sc0.3N thin film[J].IEEE Electron Device Letters, 2021, 42(9):1378-1381.

    [3] [3] YANG Yansong, LU Ruochen, GONG Songbin.High Q antisymmetric mode lithium niobate MEMS resonators with spurious mitigation[J].Journal of Microelectromechanical Systems, 2020, 29(2):135-143.

    [4] [4] PLESSKY V, YANDRAPALLI S, TURNER P J, et al.5 GHz laterally-excited bulk-wave resonators (XBARs) based on thin platelets of lithium niobate[J].Electronics Letters, 2019, 55(2): 98-100.

    [5] [5] PLESSKY V.XBAR (invited)[C]∥[S.l.]: 2022 IEEE International Ultrasonics Symposium (IUS), 2022.

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    WU Gaomi, MA Jinyi, LI Shangzhi, SI Meiju, TANG Xiaolong, JIANG Shiyi, JIANG Hongmin, ZHANG Zuwei. Design and Fabrication of C-Band Laterally Excited Bulk[J]. Piezoelectrics & Acoustooptics, 2024, 46(3): 285

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    Paper Information

    Received: Mar. 31, 2024

    Accepted: --

    Published Online: Aug. 29, 2024

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2024.03.001

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