Piezoelectrics & Acoustooptics, Volume. 46, Issue 3, 285(2024)
Design and Fabrication of C-Band Laterally Excited Bulk
[1] [1] YU Xiaoquan, HE Jie, MA Jinyi.Recent advances and prospects of Lamb wave devices based on piezo-MEMS[J].Piezoelectrics & Acoustooptics, 2022, 44(2):223-229.
[2] [2] SHAO Shuai, LUO Zhifang, WU Tao.High figure-of-merit Lamb wave resonators based on Al0.7Sc0.3N thin film[J].IEEE Electron Device Letters, 2021, 42(9):1378-1381.
[3] [3] YANG Yansong, LU Ruochen, GONG Songbin.High Q antisymmetric mode lithium niobate MEMS resonators with spurious mitigation[J].Journal of Microelectromechanical Systems, 2020, 29(2):135-143.
[4] [4] PLESSKY V, YANDRAPALLI S, TURNER P J, et al.5 GHz laterally-excited bulk-wave resonators (XBARs) based on thin platelets of lithium niobate[J].Electronics Letters, 2019, 55(2): 98-100.
[5] [5] PLESSKY V.XBAR (invited)[C]∥[S.l.]: 2022 IEEE International Ultrasonics Symposium (IUS), 2022.
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WU Gaomi, MA Jinyi, LI Shangzhi, SI Meiju, TANG Xiaolong, JIANG Shiyi, JIANG Hongmin, ZHANG Zuwei. Design and Fabrication of C-Band Laterally Excited Bulk[J]. Piezoelectrics & Acoustooptics, 2024, 46(3): 285
Received: Mar. 31, 2024
Accepted: --
Published Online: Aug. 29, 2024
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