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Acta Optica Sinica, Volume. 34, Issue 3, 305001(2014)

Effects of Ultrasonic Vibration and Wettability Enhancement on Surface Roughness on Blaze Plane of Silicon Echelon Grating

Jiao Qingbin1,2、*, Bayanheshig1, Tan Xin1, Li Yanru1, Zhu Jiwei1, and Wu Na1
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    Article index updated: Mar. 10, 2025

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    Jiao Qingbin, Bayanheshig, Tan Xin, Li Yanru, Zhu Jiwei, Wu Na. Effects of Ultrasonic Vibration and Wettability Enhancement on Surface Roughness on Blaze Plane of Silicon Echelon Grating[J]. Acta Optica Sinica, 2014, 34(3): 305001

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    Paper Information

    Category: Diffraction and Gratings

    Received: Jul. 30, 2013

    Accepted: --

    Published Online: Feb. 28, 2014

    The Author Email: Qingbin Jiao (jqbyyawyx@163.com)

    DOI:10.3788/aos201434.0305001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology