Fig. 1. Experiment device for laser damage threshold test

Fig. 2. Relationship between (a) spot position in beam quality analyzer and (b) spot position in CCD

Fig. 3. (a) Position of the Gaussian spot in CCD; (b) coordinates of the damage point after laser irradiation

Fig. 4. Distribution of damage points of Al2O3/SiO2sample irradiated at a laser energy density of 10 J/cm2 for 100 times

Fig. 5. Experimental results of laser damage thresholds measured by Gaussian spatial resolution method

Fig. 6. Effect of laser irradiation energy density selection on experimental results

Fig. 7. (a) Damage density curve based on Gaussian laser spatially resolved measurement; (b) defect information of statistical model fitting based on Gaussian distribution

Fig. 8. (a) Damage probability curve based on 1-on-1 laser damage threshold test; (b) defect information of statistical model fitting based on Gaussian distribution

Fig. 9. Analysis results of the same defect by two laser damage threshold test methods