Acta Optica Sinica, Volume. 45, Issue 3, 0322002(2025)

Design of Point Diffraction Transient Interferometer for Surface Profile Measurement of Large Aperture Optical Components

Leling Jin1,2, Jian Wang3, Dazhou Zeng3, Yajun Zhang3, Wei Pu3, Mao Luo3, Yinxu Bian1,2、*, Cuifang Kuang1,2, and Xu Liu1,2
Author Affiliations
  • 1State Key Laboratory of Extreme Photonics and Instrumentation, Zhejiang University, Hangzhou 310027, Zhejiang , China
  • 2ZJU-Hangzhou Global Scientific and Technological Innovation Center, Hangzhou 311215, Zhejiang , China
  • 3Chongqing Jialing Special Equipment Co., Ltd., Chongqing 400032, China
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    Figures & Tables(9)
    Optical path of point diffraction transient interferometer
    Schematic diagram of the shape of an elliptical pinhole. (a) Light path incident on the elliptical pinhole; (b) projection relationship between elliptical pinhole and circular pinhole
    Elliptical pinhole simulation analysis. (a) Simulation model; (b) wavefront error comparison between elliptical pinhole and circular pinhole; (c) short axis-wavefront error scan of elliptical pinhole; (d) wavefront error when the long axis deviates from the design length; (e) wavefront error when the incidence angle deviates from the design angle
    Schematic diagram of polarization phase shifting
    Imaging optical path. (a) 2D optical path model; (b) central field wave aberration; (c) Y=2 mm field wave aberration; (d) MTF and approximate ITF curves; (e) distortion curve
    Hindle ball measuring convex spherical surface. (a) Schematic diagram of optical path; (b) measurement area of measured mirror; (c) wave aberration
    Camera target light spots. (a) Low-magnification objective lens reference light is 1.82 mm off-axis; (b) low-magnification objective lens reference light is 18.2 μm off-axis; (c) high-magnification objective lens reference light is 73 μm off-axis; (b) high-magnification objective lens reference light is 0.7 μm off-axis
    • Table 1. Design specifications of point diffraction transient interferometer

      View table

      Table 1. Design specifications of point diffraction transient interferometer

      ItemSpecification
      NA≥0.5
      Wavefront RMS<0.01λ
      Good resolution frequency /mm-1>10
      Distortion /%<0.1
      Wave aberration RMS<0.001λ
      Time interval /s0
      field of view /mm>1
      Accuracy /μm<1
    • Table 2. Design results of Hindle sphere with changing distance dOS

      View table

      Table 2. Design results of Hindle sphere with changing distance dOS

      dOS /mmDiameter /mmRadius of curvature /mmConic coefficientWave aberration RMS /λOM1,ρ /mm
      200409.8348.520.610.00054.32
      300509.0421.320.100.00472.45
      400591.0591.970.320.00011.99
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    Leling Jin, Jian Wang, Dazhou Zeng, Yajun Zhang, Wei Pu, Mao Luo, Yinxu Bian, Cuifang Kuang, Xu Liu. Design of Point Diffraction Transient Interferometer for Surface Profile Measurement of Large Aperture Optical Components[J]. Acta Optica Sinica, 2025, 45(3): 0322002

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Sep. 26, 2024

    Accepted: Dec. 11, 2024

    Published Online: Feb. 19, 2025

    The Author Email: Bian Yinxu (byx@zju.edu.cn)

    DOI:10.3788/AOS241595

    CSTR:32393.14.AOS241595

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