Acta Optica Sinica, Volume. 45, Issue 3, 0322002(2025)
Design of Point Diffraction Transient Interferometer for Surface Profile Measurement of Large Aperture Optical Components
Fig. 2. Schematic diagram of the shape of an elliptical pinhole. (a) Light path incident on the elliptical pinhole; (b) projection relationship between elliptical pinhole and circular pinhole
Fig. 3. Elliptical pinhole simulation analysis. (a) Simulation model; (b) wavefront error comparison between elliptical pinhole and circular pinhole; (c) short axis-wavefront error scan of elliptical pinhole; (d) wavefront error when the long axis deviates from the design length; (e) wavefront error when the incidence angle deviates from the design angle
Fig. 5. Imaging optical path. (a) 2D optical path model; (b) central field wave aberration; (c) Y=2 mm field wave aberration; (d) MTF and approximate ITF curves; (e) distortion curve
Fig. 6. Hindle ball measuring convex spherical surface. (a) Schematic diagram of optical path; (b) measurement area of measured mirror; (c) wave aberration
Fig. 7. Camera target light spots. (a) Low-magnification objective lens reference light is 1.82 mm off-axis; (b) low-magnification objective lens reference light is 18.2 μm off-axis; (c) high-magnification objective lens reference light is 73 μm off-axis; (b) high-magnification objective lens reference light is 0.7 μm off-axis
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Leling Jin, Jian Wang, Dazhou Zeng, Yajun Zhang, Wei Pu, Mao Luo, Yinxu Bian, Cuifang Kuang, Xu Liu. Design of Point Diffraction Transient Interferometer for Surface Profile Measurement of Large Aperture Optical Components[J]. Acta Optica Sinica, 2025, 45(3): 0322002
Category: Optical Design and Fabrication
Received: Sep. 26, 2024
Accepted: Dec. 11, 2024
Published Online: Feb. 19, 2025
The Author Email: Bian Yinxu (byx@zju.edu.cn)
CSTR:32393.14.AOS241595