Photonics Research, Volume. 11, Issue 8, 1390(2023)
High-power distributed feedback lasers based on InP corrugated sidewalls at
Fig. 1. The simulation result for the device with corrugated sidewalls and DFB gratings. (a) Waveguide loss of waveguide modes in a waveguide with a full set of corrugated sidewalls, as a function of period of sidewall corrugation. The orange area represents the optimal range selected for the device process etching considering the loss of the fundamental mode and higher-order modes and the feasibility of the process etching. (b) Waveguide loss of waveguide modes in a waveguide with a full set of corrugated sidewalls, as a function of the depth of sidewall corrugation. The gray area represents the optimal range selected for the device process etching considering the loss of the fundamental mode and higher-order modes and the feasibility of the process etching. (c) Waveguide loss of waveguide modes in a waveguide with a full set of device ridge widths, as a function of the ridge width. The cyan area represents the optimal range selected for the device process etching considering the loss of the fundamental mode and higher-order modes and the feasibility of the process etching. (d) The coupling coefficient (
Fig. 2. (a) 3D cross-sectional model of a 2 μm DFB laser. The inset shows an enlarged view of the buried and corrugated gratings of the device. (b) Scanning electron microscope image of the fabricated 2 μm DFB laser. (c) Top view of the buried grating and corrugated sidewalls. (d) Enlarged view of the buried grating and sidewall grating to verify the dimensions.
Fig. 3.
Fig. 4. CW emission spectra of a second-order DFB laser at different temperatures from 288 to 318 K. (a) CW emission spectra of a second-order DFB laser with ridge widths of 8 μm at different temperatures from 288 to 318 K. The inset shows the lasing spectra under different injection currents at 300 K. (b) CW emission spectra of a second-order DFB laser with ridge widths of 15 μm at different temperatures from 288 to 318 K. The inset shows the lasing spectra under different injection currents at 300 K.
Fig. 5. Far-field profiles of edge emission in the ridge width direction. The circles and squares represent the experimental measurements, which are fitted with Gaussian functions, shown as dashed-dotted lines.
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Yongqiang Sun, Yunfei Xu, Jinchuan Zhang, Fengmin Chen, Junqi Liu, Shuman Liu, Quanyong Lu, Ning Zhuo, Lijun Wang, Fengqi Liu, Shenqiang Zhai, "High-power distributed feedback lasers based on InP corrugated sidewalls at
Category: Lasers and Laser Optics
Received: Dec. 27, 2022
Accepted: May. 29, 2023
Published Online: Jul. 26, 2023
The Author Email: Jinchuan Zhang (zhangjinchuan@semi.ac.cn), Fengmin Chen (chengfm@semi.ac.cn), Shenqiang Zhai (zsqlzsmbj@semi.ac.cn)