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Piezoelectrics & Acoustooptics, Volume. 46, Issue 6, 963(2024)

Design and Performance Analysis of Piezoelectric-Actuated Aerostatic Gap Adjustment Mechanism

ZHU Yuanshen, SHI Minghui, QIN Dongchen, CHEN Jiangyi, and SHEN Peng
Author Affiliations
  • Faculty of Mechanical and Power Engineering, Zhengzhou University, Zhengzhou 450001, China
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    ZHU Yuanshen, SHI Minghui, QIN Dongchen, CHEN Jiangyi, SHEN Peng. Design and Performance Analysis of Piezoelectric-Actuated Aerostatic Gap Adjustment Mechanism[J]. Piezoelectrics & Acoustooptics, 2024, 46(6): 963

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    Received: Jul. 22, 2024

    Accepted: Feb. 13, 2025

    Published Online: Feb. 13, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2024.06.020

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology