[1] [1] L Dong, A K Agarwal, D J Beebe, et al.. Adaptive liquid microlenses activated by stimuli-responsive hydrogels[J]. Nature, 2006, 442(7102): 551-554.

[2] [2] H Ren, S T Wu. Variable-focus liquid lens[J]. Opt Express, 2007, 15(10): 5931-5936.

[3] [3] F Schneider, J Draheim, C Müller, et al.. Optimization of an adaptive PDMS-membrane lens with an integrated actuator[J]. Sensors and Actuators A: Physical, 2009, 154(2): 316-321.

[4] [4] Y Seow, A Liu, L Chin, et al.. Different curvatures of tunable liquid microlens via the control of laminar flow rate[J]. Appl Phys Lett, 2008, 93(8): 084101.

[5] [5] W Xiao, S Hardt. An adaptive liquid microlens driven by a ferrofluidic transducer[J]. Journal of Micromechanics and Microengineering, 2010, 20(5): 055032.

[6] [6] Zheng Haobin, He Yanlan, Ding Daoyi. The developing milestones of liquid lens[J]. Physics and Engineering, 2008, 18(4): 42-47.

[7] [7] F Schneider, J Draheim, R Kamberger, et al.. Process and material properties of polydimethylsiloxane (PDMS) for Optical MEMS[J]. Sensors and Actuators A: Physical, 2009, 151(2): 95-99.

[8] [8] F Schneider, T Fellner, J Wilde, et al.. Mechanical properties of silicones for MEMS[J]. Journal of Micromechanics and Microengineering, 2008, 18(6): 065008.

[9] [9] Guo Zhongze, Zhang Weihong, Chen Yuze. The review of structure topology optization design[J]. Mechanic Design, 2007, 24(8): 1-5.

[10] [10] F Wang, B S Lazarov, O Sigmund. On projection methods, convergence and robust formulations in topology optimization[J]. Structural and Multidisciplinary Optimization, 2011, 43(6): 767-784.

[11] [11] Z Liu, J G Korvink. Using artificial reaction force to design compliant mechanism with multiple equality displacement constraints[J]. Finite Elements in Analysis and Design, 2009, 45(8): 555-568.

[12] [12] T Buhl, C B Pedersen, O Sigmund. Stiffness design of geometrically nonlinear structures using topology optimization[J]. Structural and Multidisciplinary Optimization, 2000, 19(2): 93-104.

[13] [13] C B Pedersen, T Buhl, O Sigmund. Topology synthesis of large-displacement compliant mechanisms[J]. International Journal for Numerical Methods in Engineering, 2001, 50(12): 2683-2705.

[14] [14] E Andreassen, A Clausen, M Schevenels, et al.. Efficient topology optimization in MATLAB using 88 lines of code[J]. Structural and Multidisciplinary Optimization, 2011, 43(1): 1-16.

[15] [15] O Sigmund. On the design of compliant mechanisms using topology optimization[J]. Journal of Structural Mechanics, 1997, 25(4): 493-524.

[16] [16] Zhao Lei, Gong Yan. Design and analysis for the high-precision lens support structure of objective lens for lithography[J]. Acta Optica Sinica, 2012, 32(9): 0922001.

[17] [17] Chen Fulin, Zhang Jingxu, Wu Xiaoxia, et al.. Supoorting structure of 620 mm thin primary mirror and its active surface correction[J]. Optics and Precision Engineering, 2011,19(5): 1022-1029.

[18] [18] Yang Guanghua, Li Yanqiu. Thermal and structural deformation of projection optics and its inflance on optical imaging performance for 22 nm extreme ultraviolet lithography[J]. Acta Optica Sinica, 2012, 32(3): 0322005.

[19] [19] Wu Xiaoxia, Yang Hongbo, Zhang Jingxu, et al.. Optimal design of support for the large-aperture sphere mirror[J]. Acta Photonica Sinica, 2009, 38(1): 129-132.

[20] [20] Ceng Chunmei, Guo Peiji, Yu Jingchi. Demonstration and analysis on correction of 0.5 m ultra-thin mirror with active supports[J]. Optics and Precision Engineering, 2010, 18(3): 571-578.

[21] [21] Zhang Wei, Liu Jianfeng, Long Funian, et al.. Study on wavefront fitting using Zernike polynomials[J]. Optical Technique, 2005, 31(5): 675-678.

[22] [22] Lan Gongpu, Wang Xuan, Liang Wei, et al.. Optical design and thermal analysis for the active-focusing aerial camera objective[J]. Acta Optica Sinica, 2012, 32(3): 0322006.

[23] [23] Yuan Wenquan, Gong Yan. Design and analysis for the high-prescision lens support structure of objective lens for lithography[J]. Acta Optica Sinica, 2011, 31(12): 1222003.