Chinese Journal of Lasers, Volume. 20, Issue 12, 900(1993)

Exact structure determination of Mo/Si soft X-ray multilayer by small angle difraction

[in Chinese], [in Chinese], and [in Chinese]
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    CLP Journals

    [1] Zhu Yadan, Fang Ming, Yi Kui. Precise Control of Thickness Uniformity in Mo/Si Soft X-Ray Multilayer[J]. Acta Optica Sinica, 2011, 31(11): 1131001

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    [in Chinese], [in Chinese], [in Chinese]. Exact structure determination of Mo/Si soft X-ray multilayer by small angle difraction[J]. Chinese Journal of Lasers, 1993, 20(12): 900

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    Paper Information

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    Received: Dec. 25, 1992

    Accepted: --

    Published Online: Dec. 7, 2007

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