Journal of Synthetic Crystals, Volume. 52, Issue 5, 878(2023)
AlN Films Fabricated by Molecular Beam Epitaxy with Metal Modulation
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LIU Huan, SHAO Pengfei, CHEN Songlin, ZHOU Hui, LI Siqi, TAO Tao, XIE Zili, LIU Bin, CHEN Dunjun, ZHENG Youdou, ZHANG Rong, WANG Ke. AlN Films Fabricated by Molecular Beam Epitaxy with Metal Modulation[J]. Journal of Synthetic Crystals, 2023, 52(5): 878
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Received: Mar. 15, 2023
Accepted: --
Published Online: Jun. 11, 2023
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CSTR:32186.14.
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