Chinese Journal of Lasers, Volume. 28, Issue 6, 570(2001)

Preparation of Ferroelectric PZT Thin Films by Pulsed Laser Deposition and the Dependence of Substrate Temperature

[in Chinese]1, [in Chinese]2, and [in Chinese]1,2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(9)

    [2] [2] Y. H. Xu. Ferroelectric Materials and Their Applications. North-Holland, 1991. 101~115

    [3] [3] A. L. Roytburd. Elastic Domains in Ferroelectric Epitaxial Films, in Thin Film Ferroelectric Materials and Devices. Edited by R. Ramesh. Kluwer Academic Publishers, 1997. 71~90

    [4] [4] S. Kwak, A. Erbil, J. D. Budai et al.. Domain formation and strain relaxation in epitaxial ferroelectric heterostructures. Phys. Rev. B, 1994, 49(21):14865~14879

    [5] [5] W. K. Choi, S. K. Choi, H. M. Lee. Relationship between domain structure and film thickness in epitaxial PbTiO3 films deposited on MgO(001) by reactive sputtering. J. Mater. Res., 1999, 14(12):4677~4684

    [6] [6] K. S. Lee, Y. M. Kang, S. Baik. Determination of domain structure and abundance of epitaxial Pb(Zr,Ti)O3 thin films grown on MgO(001) by rf magnetron sputtering. J. Mater. Res., 1999, 14(1):132~141

    [7] [7] S. Y. Kweon, S. H. Yi, S. K. Choi. Intrinsic stress dependence of c-axis orientation ratio in PbTiO3 thin films deposited by reactive sputtering. J. Vac. Sci. Tech. A, 1997, 15(1):57~61

    [8] [8] W. Pompe, X. Gong, Z. Suo et al.. Elastic energy release due to domain formation in the strained epitaxy of ferroelectric and ferroelastic films. J. Appl. Phys., 1993, 74(10):6012~6019

    [9] [9] C. M. Foster, W. Pompe, A. C. Daykin et al.. Relative coherency strain and phase transformation history in epitaxial ferroelectric thin films. J. Appl. Phys., 1996, 79(3):1405~1415

    [10] [10] K. Iijima, Y. Tomita, R. Takayama et al.. Preparation of c-axis oriented PbTiO3 thin films and their crystal-lographic, dielaetric and Pyroelectric properties. J. Appl. Phys., 1986, 60(1):361~367

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    [in Chinese], [in Chinese], [in Chinese]. Preparation of Ferroelectric PZT Thin Films by Pulsed Laser Deposition and the Dependence of Substrate Temperature[J]. Chinese Journal of Lasers, 2001, 28(6): 570

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    Paper Information

    Category: laser manufacturing

    Received: Mar. 9, 2000

    Accepted: --

    Published Online: Aug. 10, 2006

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