Microelectronics, Volume. 53, Issue 3, 531(2023)
Study on Factors Influencing Differences of Surface Quality of Silicon Carbide Wafers
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FAN Yuandong, LI Hui, WANG Yingming, GAO Pengcheng, WANG Lei, GAO Fei. Study on Factors Influencing Differences of Surface Quality of Silicon Carbide Wafers[J]. Microelectronics, 2023, 53(3): 531
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Received: Apr. 28, 2023
Accepted: --
Published Online: Jan. 3, 2024
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