Hot-wire chemical vapor deposition low-loss hydrogenated amorphous silicon waveguides for silicon photonic devices

Swe Z. Oo; Antulio Tarazona; Ali Z. Khokhar; Rafidah Petra; Yohann Franz; Goran Z. Mashanovich; Graham T. Reed; Anna C. Peacock; Harold M. H. Chong

doi:10.1364/PRJ.7.000193

Photonics Research, Volume. 7, Issue 2, 193(2019)

Hot-wire chemical vapor deposition low-loss hydrogenated amorphous silicon waveguides for silicon photonic devices

Swe Z. Oo^1,2、*, Antulio Tarazona², Ali Z. Khokhar², Rafidah Petra¹, Yohann Franz², Goran Z. Mashanovich², Graham T. Reed^2,3, Anna C. Peacock², and Harold M. H. Chong¹

Author Affiliations

¹School of Electronics and Computer Science, University of Southampton, SO17 1BJ, UK

²Optoelectronics Research Centre, University of Southampton, SO17 1BJ, UK

³School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore, Singapore

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Swe Z. Oo, Antulio Tarazona, Ali Z. Khokhar, Rafidah Petra, Yohann Franz, Goran Z. Mashanovich, Graham T. Reed, Anna C. Peacock, Harold M. H. Chong, "Hot-wire chemical vapor deposition low-loss hydrogenated amorphous silicon waveguides for silicon photonic devices," Photonics Res. 7, 193 (2019)

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Paper Information

Category: Silicon Photonics

Received: May. 11, 2018

Accepted: Dec. 18, 2018

Published Online: Feb. 19, 2019

The Author Email: Swe Z. Oo (S.Oo@soton.ac.uk)

DOI:10.1364/PRJ.7.000193

Topics

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