Journal of the European Optical Society-Rapid Publications, Volume. 19, Issue 1, 2023029(2023)

Experimental and numerical polarization analysis of the 3D transfer behavior in microsphere-assisted interferometry for 1D phase gratings

Lucie Hüser*, Tobias Pahl*, and Peter Lehmann*
Author Affiliations
  • Measurement Technology Group, Faculty of Electrical Engineering and Computer Science, University of Kassel, Wilhelmshöher Allee 71, 34121 Kassel, Germany
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    [11] L. Hüser, T. Pahl, M. Künne, P. Lehmann. Microsphere assistance in interference microscopy with high numerical aperture objective lenses. J. Opt. Microsyst., 2, 044501(2022).

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    [13] T. Pahl, S. Hagemeier, M. Künne, D. Yang, P. Lehmann. 3D modeling of coherence scanning interferometry on 2D surfaces using FEM. Opt. Express, 28, 39807(2020).

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    Lucie Hüser, Tobias Pahl, Peter Lehmann. Experimental and numerical polarization analysis of the 3D transfer behavior in microsphere-assisted interferometry for 1D phase gratings[J]. Journal of the European Optical Society-Rapid Publications, 2023, 19(1): 2023029

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    Paper Information

    Category: Research Articles

    Received: Jan. 27, 2023

    Accepted: May. 2, 2023

    Published Online: Aug. 31, 2023

    The Author Email: Hüser Lucie (, Pahl Tobias (, Lehmann Peter (