Single-mode bending optofluidic waveguides and beam splitters in fused silica enabled by polarization-independent femtosecond-laser-assisted etching

Jianping Yu; Jian Xu; Jinxin Huang; Jianfang Chen; Jia Qi; Ya Cheng

doi:10.1364/PRJ.546310

Photonics Research, Volume. 13, Issue 6, 1562(2025)

Single-mode bending optofluidic waveguides and beam splitters in fused silica enabled by polarization-independent femtosecond-laser-assisted etching

Jianping Yu^1,2, Jian Xu^1,2,5、*, Jinxin Huang^1,2, Jianfang Chen^3,6、*, Jia Qi^1,2, and Ya Cheng^1,2,3,4

Author Affiliations

¹Engineering Research Center for Nanophotonics and Advanced Instrument, School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China

²XXL—The Extreme Optoelectromechanics Laboratory, School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China

³Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

⁴State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200241, China

⁵e-mail: jxu@phy.ecnu.edu.cn

⁶e-mail: jfchen@siom.ac.cn

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Jianping Yu, Jian Xu, Jinxin Huang, Jianfang Chen, Jia Qi, Ya Cheng, "Single-mode bending optofluidic waveguides and beam splitters in fused silica enabled by polarization-independent femtosecond-laser-assisted etching," Photonics Res. 13, 1562 (2025)

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Paper Information

Category: Lasers and Laser Optics

Received: Oct. 30, 2024

Accepted: Mar. 20, 2025

Published Online: May. 26, 2025

The Author Email: Jian Xu (jxu@phy.ecnu.edu.cn), Jianfang Chen (jfchen@siom.ac.cn)

DOI:10.1364/PRJ.546310

CSTR:32188.14.PRJ.546310

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology