Fig. 1. RHEED diffraction pattern during growth. (a) Deoxidation processing of GaAs substrate; (b) growth of GaAs buffer layer; (c) growth of InxGa1-xAs film by adding In component; (d) growth of InxGa1-xAs film

Fig. 2. Optical photograph of InxGa1-xAs film and corresponding XRD image. (a) Optical photograph; (b) XRD image

Fig. 3. PL spectra of InxGa1-xAs film at room temperature, inset shows energy band diagram corresponding to luminescence at room temperature

Fig. 4. Raman spectra of InxGa1-xAs film and GaAs substrate at room temperature