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Chinese Journal of Lasers, Volume. 43, Issue 2, 202001(2016)

Compound Cavity ArF Excimer Laser with High Efficiency

Fan Yuanyuan1,2、*, Zhou Yi1,2, Liu Guangyi1,2, Song Xingliang1,2, Shan Yaoying1,2, Wang Qian1,2, and Zhao Jiangshan1,2
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    Article index updated: Mar. 10, 2025

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    Fan Yuanyuan, Zhou Yi, Liu Guangyi, Song Xingliang, Shan Yaoying, Wang Qian, Zhao Jiangshan. Compound Cavity ArF Excimer Laser with High Efficiency[J]. Chinese Journal of Lasers, 2016, 43(2): 202001

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    Paper Information

    Category: Laser physics

    Received: Sep. 7, 2015

    Accepted: --

    Published Online: Jan. 25, 2016

    The Author Email: Yuanyuan Fan (fyy@aoe.ac.cn)

    DOI:10.3788/cjl201643.0202001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology