Acta Optica Sinica, Volume. 24, Issue 9, 1279(2004)

Research on the Deposition of Thick Silica on Silicon Substrate by Flame Hydrolysis Deposition

[in Chinese]*, [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Research on the Deposition of Thick Silica on Silicon Substrate by Flame Hydrolysis Deposition[J]. Acta Optica Sinica, 2004, 24(9): 1279

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    Paper Information

    Category: Materials

    Received: May. 22, 2003

    Accepted: --

    Published Online: Jun. 12, 2006

    The Author Email: (dingshang@red.semi.ac.cn)

    DOI:

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