[1] [1] YANG S,AI Y,CHENG Z,et al.Method of the out-of-band rejection improvement of the AlN based surface acoustic wave filters［J］.Ultrasonics,2018,91:30-33.

[2] [2] WANG K,WEI Z,LIN Z,et al.Sorting of tumour cells in a microfluidic device by multi-stage surface acoustic waves［J］.Sensors and Actuators B Chemical,2017,258:1174-1183.

[3] [3] MA G M,WU Z,ZHOU H Y,et al.A wireless and passive on-line temperature monitoring system for gis based on surface acoustic wave sensor［J］.IEEE Transactions on Power Delivery,2016,31(3):1270-1280.

[4] [4] SATZINGER K J,ZHONG Y P,CHANG H S,et al.Quantum control of surface acoustic wave phonons［J］.Nature,2018,563: 661-665.

[5] [5] YOUN-SUK C,JOONHYUNG L,YEOLHO L,et al.Increase in detection sensitivity of surface acoustic wave biosensor using triple transit echo wave［J］.Applied Physics Letters,2018,113(8):083702.

[6] [6] MORTET V,ELMAZRIA O,NESLADEK M,et al.Surface acoustic wave propagation in aluminum nitride-unpolished freestanding diamond structures［J］.Applied Physics Letters,2002,81(9):1720-1722.

[7] [7] SIEMENS M E,LI Q,MURNANE M M,et al.High-frequency surface acoustic wave propagation in nanostructures characterized by coherent extreme ultraviolet beams［J］.Applied Physics Letters,2009,94(9):093103-093103-3.

[8] [8] WANG L,CHEN S,ZHANG J,et al.Enhanced performance of 17.7 GHz SAW devices based on AlN/diamond/Si layered structure with embedded nanotransducer［J］.Applied Physics Letters,2017,111(25):253502.

[9] [9] FU S,WANG W,QIAN L,et al.High frequency surface acoustic wave devices based on ZnO/SiC layered structure［J］.IEEE Electron Device Letters,2019,40(1): 103-106.

[10] [10] ALMIRALL A,OLIVERI S,DANIAU W,et al.High-frequency surface acoustic wave devices based on epitaxial Z-LiNbO3 layers on sapphire［J］.Applied Physics Letters,2019,114(16):162905.

[11] [11] HU B,ZHANG S,ZHANG H,et al.Fabrications of Lband LiNbO3-based SAW resonators for aerospace applications［J］.Micromachines,2019,10(6):349.

[12] [12] BRUGGER M S,SCHNITZLER L G,NIEBERLE T,et al.Shear-horizontal surface acoustic wave sensor for non-invasive monitoring of dynamic cell spreading and attachment in wound healing assays［J］.Biosensors & Bioelectronics,2021,173:112807.

[13] [13] RO R Y,LEE R Y,LIN Z X,et al.Surface acoustic wave characteristics of a (100) ZnO/(100) AlN/diamond structure［J］.Thin Solid Films,2013 529(1):470-474.

[14] [14] WU T T,CHEN Y Y.Exact analysis of dispersive SAW devices on ZnO/diamond/Si-layeredstructures［J］.IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control,2002,49(1):142-149.

[15] [15] DAVIDSSON J,IVDY V,ARMIENTO R,et al.Identi-fication of divacancy and silicon vacancy qubits in 6H-SiC［J］.Applied Physics Letters,2020,116(5):059901.

[16] [16] WANG Y,WASA K,ZHANG S Y.Effects of deposition conditions on the structural and acoustic characteristics of (1120) ZnO thin films on R-sapphire substrates［J］.IEEE Transactions on Ultrasonics Ferroelectrics & Frequency Control,2012,59(8):1613.

[17] [17] FU S,LI Q,GAO S,et al.Quality-enhanced AlN epitaxial films grown on c-sapphire using ZnO buffer layer for SAW applications［J］.Applied Surface Science,2017,402(30):392-399.

[18] [18] WANG Y,ZHANG S Y,FAN L,et al.Characteristics of surface acoustic waves excited by (1120) Zno films deposited on R-sapphire substrates［J］.IEEE Trans Ultrason Ferroelectr Freq Control,2013,60(6):1213-1218.

[19] [19] MITSUYU T,ONO S,WASA K.Structures and SAW properties of RF-sputtered single-crystal films of ZnO on sapphire［J］.Journal of Applied Physics,1980,51(5):2464

[20] [20] WANG Y,ZHANG S Y,XU J,et al.Characteristics of surface acoustic waves in (1120) ZnO film/R-sapphire substrate structures［J］.Science China Physics,Mechanics & Astronomy,2018,61(2): 024311.

[21] [21] BRIZOUAl L L,ELMAZRIA O.FEM modeling of AlN/diamond surface acoustic waves device［J］.Diamond & Related Materials,2007,16(4/7):987-990.

[22] [22] LAN X D,ZHANG S Y,WANG Y,et al.Humidity responses of Love wave sensors based on ZnO/R-sapphire bilayer structures［J］.Sensors and Actuators A Physical,2015,230:136-141.

[23] [23] PLESSKY V,KOSKELA J.Coupling-of-modes analysis of SAW devices［J］.International Journal of High Speed Electronics & Systems,2000,10:867.

[24] [24] LAN X D,ZHANG S Y,FAN L,et al.Simulation of SAW humidity sensors based on (1120) ZnO/R-sapphire structures［J］.Sensors,2016,16(11):1112.

[25] [25] FARNELL G W.Elastic wave propagation in thin layers［J］.Physical Acoustics,1972:35-127.

[26] [26] LAMANNA L,RIZZI F,GUIDO F,et al.Aluminum nitride-based flexible surface acoustic wave devices fabricated on transparent polyethylene naphthalate for wearable sensing［J］.Advanced Electronic Materials,2019,5(6):1900095-1900095.

[27] [27] BARTOLI F,STREQUE J,GHANBAJA J,et al.Epitaxial growth of Sc0.09Al0.91N and Sc0.18Al0.82N thin films on sapphire substrates by magnetron sputtering for surface acoustic waves applications［J］.Sensors,2020,20(16):4630.

[28] [28] THIERRY A,OMAR E,BADREDDINE A,et al.Surface acoustic wave devices based on AlN/sapphire structure for high temperature applications［J］.Applied Physics Letters,2010,96(20):141909.

[29] [29] SHEN J,LUO J,FU S,et al.3D layout of interdigital transducers for high frequency surface acoustic wave devices［J］.IEEE Access,2020,8:123262-123271.

[30] [30] SOLAL M,HOLMGREN O,KOKKONEN K.Design,simulation,and visualization of R-SPUDT devices with transverse mode suppression［J］.Ultrasonics Ferroelectrics & Frequency Control IEEE Transactions on,2010,57(2):412-420.