Journal of Terahertz Science and Electronic Information Technology , Volume. 18, Issue 3, 538(2020)
Research progress of micro-scale hemispherical resonator gyroscopes based on etching of HNA solution
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ZHENG Xianze, TANG Bin, WANG Yue, XIONG Zhuang. Research progress of micro-scale hemispherical resonator gyroscopes based on etching of HNA solution[J]. Journal of Terahertz Science and Electronic Information Technology , 2020, 18(3): 538
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Received: Jan. 30, 2019
Accepted: --
Published Online: Jul. 16, 2020
The Author Email: XIONG Zhuang (xiong.zhuang@caep.cn)
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