Journal of Synthetic Crystals, Volume. 54, Issue 2, 244(2025)

Electronic Transport Properties of Sn-Doped β-Ga2O3 (010) Thin Films Grown by MBE Homoepitaxial Growth

ZHANG Ziqi1, YANG Zhenni1,2, KUANG Siliang1,2, WEI Shenglong1, XU Wenjing1,2, CHEN Duanyang3、*, QI Hongji2,3, and ZHANG Hongliang1
Author Affiliations
  • 1State Key Laboratory of Physical Chemistry of Solid Surfaces, College of Chemistry and Chemical Engineering, Xiamen University, Xiamen 361005, China
  • 2Hangzhou Institute of Optics and Fine Mechanics, Hangzhou 311421, China
  • 3Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
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    In this work, the electronic transport properties of unintentionally doped (UID) and tin-doped β-Ga2O3 homoepitaxial thin films grown by molecular beam epitaxy (MBE) are reported, with electron densities ranging from 3.2×1016 to 2.9×1019 cm-3. The UID thin film with an electron density of 3.2×1016 cm-3 exhibits an excellent room-temperature mobility of 125 cm2·V-1·s-1 and a peak mobility of 875 cm2·V-1·s-1 at 80 K, reaching the advanced standard of MBE-grown Ga2O3 thin films. Temperature-dependent Hall measurements were utilized to characterize the electronic transport properties of the homoepitaxial thin films, yielding a tin dopant activation energy of 76.2 meV. By fitting the scattering model, the electronic scattering properties of this series of homoepitaxial thin films were analyzed, revealing that ionized impurity (II) scattering from intrinsic defects and polar optical phonon (POP) scattering from Coulombic forces between cations and anions in the crystal limit the mobility growth at low and high temperatures, respectively.

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    ZHANG Ziqi, YANG Zhenni, KUANG Siliang, WEI Shenglong, XU Wenjing, CHEN Duanyang, QI Hongji, ZHANG Hongliang. Electronic Transport Properties of Sn-Doped β-Ga2O3 (010) Thin Films Grown by MBE Homoepitaxial Growth[J]. Journal of Synthetic Crystals, 2025, 54(2): 244

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    Paper Information

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    Received: Nov. 7, 2024

    Accepted: Mar. 31, 2025

    Published Online: Mar. 31, 2025

    The Author Email: CHEN Duanyang (chenduanyang@siom.ac.cn)

    DOI:10.16553/j.cnki.issn1000-985x.2024.0279

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