Journal of Synthetic Crystals, Volume. 54, Issue 2, 244(2025)
Electronic Transport Properties of Sn-Doped β-Ga2O3 (010) Thin Films Grown by MBE Homoepitaxial Growth
In this work, the electronic transport properties of unintentionally doped (UID) and tin-doped β-Ga2O3 homoepitaxial thin films grown by molecular beam epitaxy (MBE) are reported, with electron densities ranging from 3.2×1016 to 2.9×1019 cm-3. The UID thin film with an electron density of 3.2×1016 cm-3 exhibits an excellent room-temperature mobility of 125 cm2·V-1·s-1 and a peak mobility of 875 cm2·V-1·s-1 at 80 K, reaching the advanced standard of MBE-grown Ga2O3 thin films. Temperature-dependent Hall measurements were utilized to characterize the electronic transport properties of the homoepitaxial thin films, yielding a tin dopant activation energy of 76.2 meV. By fitting the scattering model, the electronic scattering properties of this series of homoepitaxial thin films were analyzed, revealing that ionized impurity (II) scattering from intrinsic defects and polar optical phonon (POP) scattering from Coulombic forces between cations and anions in the crystal limit the mobility growth at low and high temperatures, respectively.
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ZHANG Ziqi, YANG Zhenni, KUANG Siliang, WEI Shenglong, XU Wenjing, CHEN Duanyang, QI Hongji, ZHANG Hongliang. Electronic Transport Properties of Sn-Doped β-Ga2O3 (010) Thin Films Grown by MBE Homoepitaxial Growth[J]. Journal of Synthetic Crystals, 2025, 54(2): 244
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Received: Nov. 7, 2024
Accepted: Mar. 31, 2025
Published Online: Mar. 31, 2025
The Author Email: CHEN Duanyang (chenduanyang@siom.ac.cn)