Chinese Optics, Volume. 15, Issue 5, 912(2022)

Review of ultraviolet photodetectors based on micro/nano-structured wide bandgap semiconductor oxide

Xing CHEN1,2、*, Chang ZHOU1,2, Ke-wei LIU1,2、*, and De-zhen SHEN1,2、*
Author Affiliations
  • 1State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • show less

    Ultraviolet photodetection technology is another dual-use detection technology after infrared detection and laser detection technology, which has broad application prospects. Vacuum photomultiplier tubes and Si-based photodiodes are common commercial UV detectors, but vacuum photomultiplier tubes are susceptible to high temperatures and electromagnetic radiation, and need to work under high pressure while Si-based photodiodes require expensive filters. Wide bandgap semiconductor ultraviolet photodetectors have overcome some of the problems faced by the above two devices, and are becoming the research hotspot. Among them, wide bandgap oxide materials have attracted extensive attention, due to the advantages of easy preparation for high response and high gain devices, and rich micro-structures and nano-structures. In this paper, ultraviolet photodetectors based on micro/nano-structured wide bandgap semiconductor oxide are combed, and some related researches in recent years are reviewed. The oxide materials involved include ZnO, Ga2O3, SnO2 and TiO2, etc. and the device structures involved include metal-semiconductor-metal devices, Schottky junction devices and heterojunction devices, etc.

    Tools

    Get Citation

    Copy Citation Text

    Xing CHEN, Chang ZHOU, Ke-wei LIU, De-zhen SHEN. Review of ultraviolet photodetectors based on micro/nano-structured wide bandgap semiconductor oxide[J]. Chinese Optics, 2022, 15(5): 912

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Review

    Received: Jun. 15, 2022

    Accepted: --

    Published Online: Sep. 29, 2022

    The Author Email:

    DOI:10.37188/CO.2022-0132

    Topics