Optics and Precision Engineering, Volume. 15, Issue 10, 1547(2007)
PZT actuator control complex arithmetic based on nonlinear model
References(4)
[1] [1] POPOV E P.The Theory of Nonlinear Automation Control System[M].Moscow:Karl B DA,1988.
[2] [2] JUNG S.Improvement of scanning accuracy of PZT piezoeletric actuators by feed-forward model-reference control[J].Precision Engineering,1994,14:49-55.
[3] [3] MAYERGOYZ I D.Mathematical Models of hysteresis[M].New York:Springer-Verlag,1991.
[5] [5] HEWON J.Enhancement of AFM image by compensating the hysteresis and creep effect within PZT[J].Optical Engineering for Sensing and Nanotechnology,SPIE,1999,3740:327-330.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. PZT actuator control complex arithmetic based on nonlinear model[J]. Optics and Precision Engineering, 2007, 15(10): 1547
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