Chinese Journal of Lasers, Volume. 35, Issue s2, 328(2008)
Effect of 3/SiH4 Flow Rate Ratio on the Performance of Polysilicon/SiN Composite Solar Cell
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Zhao Haofeng, Wang Ling, Xie Aigeng, Yan Kai, Wu Hongyan, Liu Bin, Huang Tingli, Xiao Yuhui. Effect of 3/SiH4 Flow Rate Ratio on the Performance of Polysilicon/SiN Composite Solar Cell[J]. Chinese Journal of Lasers, 2008, 35(s2): 328
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